中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
X-RAY-DIFFRACTION ANALYSIS OF SI1-XGEX/SI SUPERLATTICES

文献类型:期刊论文

作者MAI, ZH ; OUYANG, JT ; CUI, SF ; LI, JH ; WANG, CY ; LI, CR
刊名JOURNAL OF APPLIED PHYSICS
出版日期1992
卷号72期号:8页码:3474
ISSN号0021-8979
通讯作者MAI, ZH (reprint author), CHINESE ACAD SCI,INST PHYS,POB 603,BEIJING 10080,PEOPLES R CHINA.
中文摘要Si1-xGex/Si strained-layer superlattices grown by molecular-beam epitaxy on Si substrates were investigated by x-ray double-crystal diffraction and x-ray grazing incidence diffraction. Both coherent and incoherent interfaces between the two components of the superlattices were observed. By fitting computer-simulated double-crystal x-ray-diffraction rocking curves to the experimental data, it is determined that there exist graded variations in both the component thickness ratio t1/t2 (t1 and t2 are the thickness of the Si1-xGex and the Si layers, respectively) and the fraction x in one sample. The x-ray grazing incidence diffraction experiments reveal a lattice strain relaxation of about 27% in another sample. The lattice relaxation and the influence of variations of x and t1/t2 on the rocking curves are discussed.
收录类别SCI
语种英语
公开日期2013-09-23
源URL[http://ir.iphy.ac.cn/handle/311004/46720]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
MAI, ZH,OUYANG, JT,CUI, SF,et al. X-RAY-DIFFRACTION ANALYSIS OF SI1-XGEX/SI SUPERLATTICES[J]. JOURNAL OF APPLIED PHYSICS,1992,72(8):3474.
APA MAI, ZH,OUYANG, JT,CUI, SF,LI, JH,WANG, CY,&LI, CR.(1992).X-RAY-DIFFRACTION ANALYSIS OF SI1-XGEX/SI SUPERLATTICES.JOURNAL OF APPLIED PHYSICS,72(8),3474.
MLA MAI, ZH,et al."X-RAY-DIFFRACTION ANALYSIS OF SI1-XGEX/SI SUPERLATTICES".JOURNAL OF APPLIED PHYSICS 72.8(1992):3474.

入库方式: OAI收割

来源:物理研究所

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