Observation of defects in a C3N4/diamond/Si structure by infrared light scattering tomography
文献类型：期刊论文
| 作者 | Ma, MY ; Tsuru, T ; Ogawa, T ; Mai, ZH ; Wang, CY ; Guo, JG ; Ma, XC ; Wang, EG |
| 刊名 | JOURNAL OF PHYSICS-CONDENSED MATTER
 |
| 出版日期 | 1999 |
| 卷号 | 11期号:20页码:L191 |
| 关键词 | CZOCHRALSKI SILICON FILMS CRYSTALS DIAMOND SOLIDS PHASE C3N4 |
| ISSN号 | 0953-8984 |
| 通讯作者 | Ma, MY (reprint author), Gakushuin Univ, Ctr Comp, Tokyo 171, Japan. |
| 中文摘要 | A structure of C3N4 and diamond multilayers on Si(100) substrate was prepared by plasma enhanced chemical vapour deposition and magnetron sputtering techniques. Morphology observation and chemical composition analysis of the structure were performed by scanning electron microscopy and energy dispersive x-ray analysis. The multilayers of C3N4 and diamond on Si substrate were clearly observed and the composition ratio of nitrogen to carbon was close to 1.33. Defects in this structure were, for the first time, investigated by infrared light scattering tomography. Most defects in C3N4 and diamond multilayers were introduced by an extended growth of the original defects in Si substrate determined through layer-by-layer tomography. The defect type is analytically discussed. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-24 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/50140]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Ma, MY,Tsuru, T,Ogawa, T,et al. Observation of defects in a C3N4/diamond/Si structure by infrared light scattering tomography[J]. JOURNAL OF PHYSICS-CONDENSED MATTER,1999,11(20):L191. |
| APA | Ma, MY.,Tsuru, T.,Ogawa, T.,Mai, ZH.,Wang, CY.,...&Wang, EG.(1999).Observation of defects in a C3N4/diamond/Si structure by infrared light scattering tomography.JOURNAL OF PHYSICS-CONDENSED MATTER,11(20),L191. |
| MLA | Ma, MY,et al."Observation of defects in a C3N4/diamond/Si structure by infrared light scattering tomography".JOURNAL OF PHYSICS-CONDENSED MATTER 11.20(1999):L191. |
入库方式： OAI收割
来源：物理研究所
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