Oriented and textured growth of (111) diamond on silicon using hot filament chemical vapour deposition
文献类型：期刊论文
| 作者 | Chen, QJ ; Chen, Y ; Yang, J ; Lin, ZD |
| 刊名 | THIN SOLID FILMS
 |
| 出版日期 | 1996 |
| 卷号 | 274期号:1-2页码:160 |
| 关键词 | BIAS-ENHANCED NUCLEATION THIN-FILMS CRYSTALLOGRAPHIC ORIENTATIONS RAMAN MICROPROBE 100 SILICON SURFACE MORPHOLOGY |
| ISSN号 | 0040-6090 |
| 通讯作者 | Chen, QJ (reprint author), UNIV CHICAGO,DEPT PHYS,5720 S ELLIS AVE,CHICAGO,IL 60637, USA. |
| 中文摘要 | A very low pressure (13 Pa), high substrate temperature and a.c. discharge for the nucleation siage have been applied. Uniformly oriented and textured growth of (111) diamond (dia) with dia(111)//Si(111) and dia<<1(1)over bar>0>//Si<<1(1)over bar>0> has been achieved on not only well polished but also scratched silicon substrates using hot filament chemical vapor deposition. A probable explanation, heteroepitaxy, was hypothesized. The as-grown diamond films were characterized by Raman spectroscopy, scanning electron microscopy, and X-ray analysis. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-24 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/50466]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Chen, QJ,Chen, Y,Yang, J,et al. Oriented and textured growth of (111) diamond on silicon using hot filament chemical vapour deposition[J]. THIN SOLID FILMS,1996,274(1-2):160. |
| APA | Chen, QJ,Chen, Y,Yang, J,&Lin, ZD.(1996).Oriented and textured growth of (111) diamond on silicon using hot filament chemical vapour deposition.THIN SOLID FILMS,274(1-2),160. |
| MLA | Chen, QJ,et al."Oriented and textured growth of (111) diamond on silicon using hot filament chemical vapour deposition".THIN SOLID FILMS 274.1-2(1996):160. |
入库方式： OAI收割
来源：物理研究所
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