中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Raman spectroscopic investigation of the dissociation of dimethylsulphoxide induced by polyacrylonitrile

文献类型:期刊论文

作者Wang, ZX ; Huang, BY ; Huang, XJ ; Chen, LQ ; Xue, RJ
刊名JOURNAL OF RAMAN SPECTROSCOPY
出版日期1996
卷号27期号:12页码:901
关键词DIMETHYL-SULFOXIDE DIMETHYLSULFOXIDE ACETONITRILE
ISSN号0377-0486
通讯作者Wang, ZX (reprint author), CHINESE ACAD SCI,INST PHYS,LAB SOLID STATE ION,POB 603-29,BEIJING 100080,PEOPLES R CHINA.
中文摘要A new designed reaction chamber with new relative distribution of filament and substrates has been adopted in order to increase the deposition area of diamond films and thus increase the deposition efficiency in conventional hot filament chemical vapor deposition (HFCVD) systems. The relatively small reaction chamber was cuboid shaped (50 x 25 x 25 mm(3)) and composed of molybdenum wafers. It was established in the vacuum chamber. A tungsten filament was hung up vertically in the center of the small chamber and parallel to the gas flow path. At the four inner sides of the reaction chamber, four Si(100) substrates (30 x 10 x 0.5 mm(3)) were installed to grow diamond films. The deposition results indicate that uniform diamond films can be obtained on the four substrates, and the film growth rate is the same at both ends of the substrates. The diamond film growth rate was about 1-2 mu m/h, which is similar to those of the conventional HFCVD method. Thus, the deposition area and efficiency can be increased four times in the case without the filament number, gas how rate, and power consumption.
收录类别SCI
语种英语
公开日期2013-09-24
源URL[http://ir.iphy.ac.cn/handle/311004/51839]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
Wang, ZX,Huang, BY,Huang, XJ,et al. Raman spectroscopic investigation of the dissociation of dimethylsulphoxide induced by polyacrylonitrile[J]. JOURNAL OF RAMAN SPECTROSCOPY,1996,27(12):901.
APA Wang, ZX,Huang, BY,Huang, XJ,Chen, LQ,&Xue, RJ.(1996).Raman spectroscopic investigation of the dissociation of dimethylsulphoxide induced by polyacrylonitrile.JOURNAL OF RAMAN SPECTROSCOPY,27(12),901.
MLA Wang, ZX,et al."Raman spectroscopic investigation of the dissociation of dimethylsulphoxide induced by polyacrylonitrile".JOURNAL OF RAMAN SPECTROSCOPY 27.12(1996):901.

入库方式: OAI收割

来源:物理研究所

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