Real-time optical monitoring of the heteroepitaxy of oxides by an oblique-incidence reflectance difference technique
文献类型:期刊论文
作者 | Chen, F ; Lu, HB ; Zhao, T ; Jin, KJ ; Chen, ZH ; Yang, GZ |
刊名 | PHYSICAL REVIEW B
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出版日期 | 2000 |
卷号 | 61期号:15页码:10404 |
关键词 | MOLECULAR-BEAM-EPITAXY P-POLARIZED REFLECTANCE DIFFRACTION INTENSITY OSCILLATIONS LASER-LIGHT SCATTERING ELECTRON-DIFFRACTION FILM GROWTH IN-SITU SPECTROSCOPY GAAS(001) SURFACE |
ISSN号 | 1098-0121 |
通讯作者 | Chen, F (reprint author), Chinese Acad Sci, Ctr Condensed Matter Phys, Inst Phys, Lab Opt Phys, POB 603, Beijing 100080, Peoples R China. |
中文摘要 | Monolayer oscillations and interference oscillations were observed during the interrupted heteroepitaxy of Nb-doped strontium titanate on SrTiO3 by an oblique-incidence reflectance difference (OIRD) technique. The optical monolayer oscillations were verified by simultaneously monitored reflection high-energy electron diffraction. In modeling the surface structure as a four-layer stack, we consider the outermost incomplete layer as two parts, a homogeneous isotropic media layer with an average dielectric constant and a film layer below that with the dielectric constant of the bulk film. The numerical simulation of a simple deposition process and Monte Carlo simulation are carried out to reproduce the OIRD interference oscillations and monolayer response, respectively. The simulated amplitude of the monolayer oscillations is in good agreement with the experimental results. |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2013-09-24 |
源URL | [http://ir.iphy.ac.cn/handle/311004/51915] ![]() |
专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
推荐引用方式 GB/T 7714 | Chen, F,Lu, HB,Zhao, T,et al. Real-time optical monitoring of the heteroepitaxy of oxides by an oblique-incidence reflectance difference technique[J]. PHYSICAL REVIEW B,2000,61(15):10404. |
APA | Chen, F,Lu, HB,Zhao, T,Jin, KJ,Chen, ZH,&Yang, GZ.(2000).Real-time optical monitoring of the heteroepitaxy of oxides by an oblique-incidence reflectance difference technique.PHYSICAL REVIEW B,61(15),10404. |
MLA | Chen, F,et al."Real-time optical monitoring of the heteroepitaxy of oxides by an oblique-incidence reflectance difference technique".PHYSICAL REVIEW B 61.15(2000):10404. |
入库方式: OAI收割
来源:物理研究所
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