Sb complexes and Zn interstitials in Sb-implanted ZnO epitaxial films
文献类型:期刊论文
作者 | Liu, YP ; Ying, MJ ; Mei, ZX ; Li, JQ ; Du, XL ; Kuznetsov, AY |
刊名 | CHINESE PHYSICS B
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出版日期 | 2011 |
卷号 | 20期号:6 |
关键词 | ROOM-TEMPERATURE THIN-FILMS LI |
ISSN号 | 1674-1056 |
通讯作者 | Du, XL (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China. |
中文摘要 | In the present work, post-annealing is adopted to investigate the formation and the correlation of Sb complexes and Zn interstitials in Sb-ion implanted ZnO films, by using Raman scattering technique and electrical characterizations. The damage of Zn sublattice, produced by ion bombardment process is discerned from the unrecovered E-2 (L) peak in annealed high Sb+ dose implanted samples. It is suggested that the Zn sublattice may be strongly affected by the introduction of Sb dopant because of the formation of Sb-zn-2V(zn) complex acceptor. The appearance of a new peak at 510 cm(-1) in the annealed high dose Sb+ implanted samples is speculated to result from (Zn interstitials-O interstitials) Zn-i-O-i complex, which is in a good accordance with the electrical measurement. The p-type ZnO is difficult to obtain from the Sb+ implantation, however, which can be realized by in-situ Sb doping with proper growth conditions instead. |
收录类别 | SCI |
资助信息 | National Natural Science Foundation of China [61076007, 50532090]; National Basic Research Program of China [2007CB936203, 2009CB929400, 2009AA033101, 2011CB302002]; Chinese Academy of Sciences; Research Council of Norway |
语种 | 英语 |
公开日期 | 2013-09-24 |
源URL | [http://ir.iphy.ac.cn/handle/311004/52304] ![]() |
专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
推荐引用方式 GB/T 7714 | Liu, YP,Ying, MJ,Mei, ZX,et al. Sb complexes and Zn interstitials in Sb-implanted ZnO epitaxial films[J]. CHINESE PHYSICS B,2011,20(6). |
APA | Liu, YP,Ying, MJ,Mei, ZX,Li, JQ,Du, XL,&Kuznetsov, AY.(2011).Sb complexes and Zn interstitials in Sb-implanted ZnO epitaxial films.CHINESE PHYSICS B,20(6). |
MLA | Liu, YP,et al."Sb complexes and Zn interstitials in Sb-implanted ZnO epitaxial films".CHINESE PHYSICS B 20.6(2011). |
入库方式: OAI收割
来源:物理研究所
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