Simulation methods of ion sheath dynamics in plasma source ion implantation
文献类型：期刊论文
| 作者 | Wang, JL ; Zhang, GL ; Wang, YN ; Liu, YF ; Liu, CZ ; Yang, S |
| 刊名 | CHINESE SCIENCE BULLETIN
 |
| 出版日期 | 2004 |
| 卷号 | 49期号:8页码:757 |
| 关键词 | INNER SURFACE MODIFICATION SMALL CYLINDRICAL BORE MONTE-CARLO SIMULATION TIME VOLTAGE PULSES IN-CELL SIMULATION AUXILIARY ELECTRODE MATRIX SHEATH FINITE-RISE INTERIOR SURFACE TUBULAR MATERIAL |
| ISSN号 | 1001-6538 |
| 通讯作者 | Wang, JL (reprint author), Chinese Acad Sci, Inst Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | Progress of the theoretical studies on the ion sheath dynamics in plasma source ion implantation (PSII) is reviewed in this paper. Several models for simulating the ion sheath dynamics in PSII are provided. The main problem of nonuniform ion implantation on the target in PSII is discussed by analyzing some calculated results. In addition, based on the relative researches in our laboratory, some calculated results of the ion sheath dynamics in PSII for inner surface modification of a cylindrical bore are presented. Finally, new ideas and tendency for future researches on ion sheath dynamics in PSII are proposed. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-24 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/52576]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, JL,Zhang, GL,Wang, YN,et al. Simulation methods of ion sheath dynamics in plasma source ion implantation[J]. CHINESE SCIENCE BULLETIN,2004,49(8):757. |
| APA | Wang, JL,Zhang, GL,Wang, YN,Liu, YF,Liu, CZ,&Yang, S.(2004).Simulation methods of ion sheath dynamics in plasma source ion implantation.CHINESE SCIENCE BULLETIN,49(8),757. |
| MLA | Wang, JL,et al."Simulation methods of ion sheath dynamics in plasma source ion implantation".CHINESE SCIENCE BULLETIN 49.8(2004):757. |
入库方式： OAI收割
来源：物理研究所
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