Structural properties of magnetron sputtered ZnO films with incorporated iron
文献类型：期刊论文
| 作者 | Zhang, M ; Cao, LM ; Xu, FF ; Bando, Y ; Wang, WK |
| 刊名 | THIN SOLID FILMS
 |
| 出版日期 | 2002 |
| 卷号 | 406期号:1-2页码:40 |
| 关键词 | MICROCRYSTALLITE THIN-FILMS PULSED-LASER DEPOSITION ZINC-OXIDE FILMS ROOM-TEMPERATURE DOPED ZNO TRANSPARENT SAPPHIRE PHOTOLUMINESCENCE GROWTH GAP |
| ISSN号 | 0040-6090 |
| 通讯作者 | Xu, FF (reprint author), Natl Inst Mat Sci, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan. |
| 中文摘要 | The Fe-incorporated ZnO thin films prepared by magnetron sputtering at different deposition temperatures were investigated by X-ray diffraction (XRD) and high resolution transmission electron microscopy (HRTEM). The XRD patterns show the Films exhibit [001] preferred orientation which is perpendicular to the surface plane of the substrates. The growth direction tends to be along the [101]-axis when the deposition temperature is increased. Numerous defects have been observed in the present thin films. In the thin film deposited at 600 degreesC, a large number of stacking faults and domain lamellae were discovered at the bottom and the middle of the thin film, respectively. Polycrystallization occurred at the top of the thin films. It is suggested that Fe elements could have been incorporated into the ZnO thin films and these incorporated Fe ions, together with the deposition temperature, are responsible for the microstructural modifications in the microstructures of the thin films. (C) 2002 Elsevier Science B.V All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-24 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/53341]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, M,Cao, LM,Xu, FF,et al. Structural properties of magnetron sputtered ZnO films with incorporated iron[J]. THIN SOLID FILMS,2002,406(1-2):40. |
| APA | Zhang, M,Cao, LM,Xu, FF,Bando, Y,&Wang, WK.(2002).Structural properties of magnetron sputtered ZnO films with incorporated iron.THIN SOLID FILMS,406(1-2),40. |
| MLA | Zhang, M,et al."Structural properties of magnetron sputtered ZnO films with incorporated iron".THIN SOLID FILMS 406.1-2(2002):40. |
入库方式： OAI收割
来源：物理研究所
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