Structure stability of LaAlO3 thin films on Si substrates
文献类型:期刊论文
作者 | He, M ; Liu, GZ ; Xiang, WF ; Lu, HB ; Jin, KJ ; Zhou, YL ; Yang, GZ |
刊名 | CHINESE PHYSICS LETTERS
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出版日期 | 2007 |
卷号 | 24期号:9页码:2671 |
ISSN号 | 0256-307X |
中文摘要 | A series of amorphous and single-crystalline LaAlO3 (LAO) thin Elms are fabricated by laser molecular-beam epitaxy technique on Si substrates under various conditions of deposition. The structure stability of the LAO films annealed in high temperature and various ambients is studied by x-ray diffraction as well as high-resolution transmission election microscopy. The results show that the epitaxial LAO films have very good stability, and the structures of amorphous LAO thin films depend strongly on the conditions of deposition and post-annealing. The results reveal that the formation of LAO composition during the deposition is very important for the structure stability of LAO thin Elms. |
收录类别 | SCI |
公开日期 | 2013-09-24 |
源URL | [http://ir.iphy.ac.cn/handle/311004/53608] ![]() |
专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
推荐引用方式 GB/T 7714 | He, M,Liu, GZ,Xiang, WF,et al. Structure stability of LaAlO3 thin films on Si substrates[J]. CHINESE PHYSICS LETTERS,2007,24(9):2671. |
APA | He, M.,Liu, GZ.,Xiang, WF.,Lu, HB.,Jin, KJ.,...&Yang, GZ.(2007).Structure stability of LaAlO3 thin films on Si substrates.CHINESE PHYSICS LETTERS,24(9),2671. |
MLA | He, M,et al."Structure stability of LaAlO3 thin films on Si substrates".CHINESE PHYSICS LETTERS 24.9(2007):2671. |
入库方式: OAI收割
来源:物理研究所
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