Study on the preparation of high barrier hydrogenated carbon film and its properties
文献类型：期刊论文
| 作者 | Chen, GL ; Ge, YJ ; Zhang, YF ; Zhang, GQ ; Zhang, GL ; Wang, JL ; Lu, YF ; Gu, WC ; Feng, WR ; Liu, CZ ; Yang, SZ |
| 刊名 | ACTA PHYSICA SINICA
 |
| 出版日期 | 2005 |
| 卷号 | 54期号:2页码:818 |
| ISSN号 | 1000-3290 |
| 关键词 | CHEMICAL-VAPOR-DEPOSITION THIN-FILMS ECR-PLASMA DLC FILMS PERMEATION PARAMETERS NITROGEN CVD |
| 通讯作者 | Chen, GL (reprint author), Chinese Acad Sci, Inst Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | Hydrogenated carbon thin films were fabricated on the surface of polyethylene terepthalate(PET) by radio frequency plasma enhanced chemical vapor deposition (r. f. PECVD). The film structure properties were studied by means of atomic force microscope(AFM), x-ray photo-electron (XPS), laser Raman spectroscopy, Fourier-transform infrared spectra(FTIR) etc. The barrier property of the film was conducted on the water vapor permeation instrument. The results show that nano-hydrogenated carbon films have been deposited on PET surface and they are mainly composed of sp(2) and sp(3) hybridized hydrogenated carbon compounds. Plasma parameters influence the films' growth rate and structure characteristics. The film reduces the water vapor permeation ratio of the PET by 7 times at a film thickness of only 900nm. |
| 收录类别 | SCI |
| 语种 | 中文 |
| 公开日期 | 2013-09-24 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/53867]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Chen, GL,Ge, YJ,Zhang, YF,et al. Study on the preparation of high barrier hydrogenated carbon film and its properties[J]. ACTA PHYSICA SINICA,2005,54(2):818. |
| APA | Chen, GL.,Ge, YJ.,Zhang, YF.,Zhang, GQ.,Zhang, GL.,...&Yang, SZ.(2005).Study on the preparation of high barrier hydrogenated carbon film and its properties.ACTA PHYSICA SINICA,54(2),818. |
| MLA | Chen, GL,et al."Study on the preparation of high barrier hydrogenated carbon film and its properties".ACTA PHYSICA SINICA 54.2(2005):818. |
入库方式： OAI收割
来源：物理研究所
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