Synthesis and characterization of B-C-N compounds on molybdenum
文献类型：期刊论文
| 作者 | Yu, J ; Wang, EG ; Xu, GC |
| 刊名 | JOURNAL OF MATERIALS RESEARCH
 |
| 出版日期 | 1999 |
| 卷号 | 14期号:3页码:1137 |
| 关键词 | CHEMICAL-VAPOR-DEPOSITION CUBIC BORON-NITRIDE BC2N THIN-FILMS DIAMOND TEMPERATURE SYSTEM |
| ISSN号 | 0884-2914 |
| 通讯作者 | Wang, EG (reprint author), Chinese Acad Sci, Inst Phys, State Key Lab Surface Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | B-C-N compounds were prepared on molybdenum by means of bias-assisted hot filament chemical vapor deposition (HFCVD), Effect of the substrate temperature (T-s) on the growth of B-C-N films has been investigated systematically by x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) based on the detailed analysis and calculation of the XPS, The substrate temperature plays a key role in the formation of the bonding states, the composition, and the surface morphology. Boron carbonitride is the main phase at all depositing temperatures, and the obtained compounds are as follows: B0.83C0.17 +. B0.39C0.35N0.26 at 873 K, B0.30C0.34N0.36 at 973 K, B0.64C0.36 + B0.51C0.23N0.26 at 1073 K, B0.51C0.31N0.18 at 1173 K, and B0.37C0.54N0.09 at 1273 K. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-24 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/54298]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yu, J,Wang, EG,Xu, GC. Synthesis and characterization of B-C-N compounds on molybdenum[J]. JOURNAL OF MATERIALS RESEARCH,1999,14(3):1137. |
| APA | Yu, J,Wang, EG,&Xu, GC.(1999).Synthesis and characterization of B-C-N compounds on molybdenum.JOURNAL OF MATERIALS RESEARCH,14(3),1137. |
| MLA | Yu, J,et al."Synthesis and characterization of B-C-N compounds on molybdenum".JOURNAL OF MATERIALS RESEARCH 14.3(1999):1137. |
入库方式： OAI收割
来源：物理研究所
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