Synthesis and physicochemical properties of nanocrystalline silicon carbonitride films deposited by microwave plasma from organoelement compounds
文献类型：期刊论文
| 作者 | Fainer, NI ; Kosinova, ML ; Rumyantsev, YM ; Maksimovskii, EA ; Kuznetsov, FA ; Kesler, VG ; Kirienko, VV ; Han, BS ; Lu, C |
| 刊名 | GLASS PHYSICS AND CHEMISTRY
 |
| 出版日期 | 2005 |
| 卷号 | 31期号:4页码:427 |
| 关键词 | THIN-FILMS NITRIDE |
| ISSN号 | 1087-6596 |
| 通讯作者 | Fainer, NI (reprint author), Russian Acad Sci, Inst Inorgan Chem, Siberian Div, Pr Akademika Lavrenteva 3, Novosibirsk 630090, Russia. |
| 中文摘要 | Nanocrystalline films of a ternary compound, namely, silicon carbonitride SiCxNy, are prepared by plasma-enhanced chemical vapor deposition at temperatures of 473-1173 K with the use of a complex gaseous mixture of hexamethyldisilazane Si2NH(CH3)(6), ammonia, and helium. The chemical and phase compositions and the physicochemical properties of the films are investigated using IR, Auger electron, and X-ray photoelectron spectroscopy; ellipsometry; synchrotron X-ray powder diffraction; electron and atomic-force microscopy; microhardness measurements with a nanoindenter; and electrical measurements. Correlations of the composition of the initial gas phase and the synthesis temperature with a number of functional properties of the SiCxNy silicon carbonitride films are revealed. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-24 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/54383]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Fainer, NI,Kosinova, ML,Rumyantsev, YM,et al. Synthesis and physicochemical properties of nanocrystalline silicon carbonitride films deposited by microwave plasma from organoelement compounds[J]. GLASS PHYSICS AND CHEMISTRY,2005,31(4):427. |
| APA | Fainer, NI.,Kosinova, ML.,Rumyantsev, YM.,Maksimovskii, EA.,Kuznetsov, FA.,...&Lu, C.(2005).Synthesis and physicochemical properties of nanocrystalline silicon carbonitride films deposited by microwave plasma from organoelement compounds.GLASS PHYSICS AND CHEMISTRY,31(4),427. |
| MLA | Fainer, NI,et al."Synthesis and physicochemical properties of nanocrystalline silicon carbonitride films deposited by microwave plasma from organoelement compounds".GLASS PHYSICS AND CHEMISTRY 31.4(2005):427. |
入库方式： OAI收割
来源：物理研究所
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