中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Design and laser fabrication of controllable non-Gaussian roughness surfaces at microscale

文献类型:期刊论文

作者Luo, TT ; Liu, XN ; Chen, YH ; Huang, WH ; Liu, Z
刊名APPLIED SURFACE SCIENCE
出版日期2013
卷号276页码:95
关键词Non-Gaussian roughness surface Laser direct writing Scanning probe microscopy
ISSN号0169-4332
通讯作者Chen, YH (reprint author), Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Hefei 230026, Peoples R China.
中文摘要Surface structures at micro-/nano-scale have been studied in many fields for their wide range of applications. To understand the interdependences between surface structures and functional performances accurately, fabrication methods of complex structures with controllable surface parameters are crucial to be investigated. Toward this purpose, 3D non-Gaussian surfaces were designed and fabricated here. Two typical design methods were compared, which are based on Johnson translator and Pearson translator respectively. Several suggestions were provided to improve the design accuracy and efficiency. Primary roughness surfaces have been fabricated by laser direct writing. Different scanning paths and designed structures were compared to optimize the fabrication accuracy. The statistical and spectral characteristics of the fabricated roughness surfaces were demonstrated to be in accord with the designed values. (C) 2013 Elsevier B. V. All rights reserved.
资助信息973 Project [2011CB932801]; National Natural Science Foundation of China [91023021, 51275503]
语种英语
公开日期2014-01-16
源URL[http://ir.iphy.ac.cn/handle/311004/56873]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
Luo, TT,Liu, XN,Chen, YH,et al. Design and laser fabrication of controllable non-Gaussian roughness surfaces at microscale[J]. APPLIED SURFACE SCIENCE,2013,276:95.
APA Luo, TT,Liu, XN,Chen, YH,Huang, WH,&Liu, Z.(2013).Design and laser fabrication of controllable non-Gaussian roughness surfaces at microscale.APPLIED SURFACE SCIENCE,276,95.
MLA Luo, TT,et al."Design and laser fabrication of controllable non-Gaussian roughness surfaces at microscale".APPLIED SURFACE SCIENCE 276(2013):95.

入库方式: OAI收割

来源:物理研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。