中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Dielectric and insulating properties of SrTiO3/Si heterostructure controlled by cation concentration

文献类型:期刊论文

作者Yang, F ; Yang, ZZ ; Li, WT ; Li, FM ; Zhu, XT ; Gu, L ; Lee, HD ; Shubeita, S ; Xu, C ; Gustafsson, T ; Guo, JD
刊名SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY
出版日期2013
卷号56期号:12页码:2404
关键词oxide heterostructure oxide films film stoichiometry cation concentration interfacial layer
ISSN号1674-7348
通讯作者Guo, JD (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China.
中文摘要SrTiO3 films with different cation concentration were deposited on Si(001) substrates by oxide molecular beam epitaxy. An amorphous layer was observed at the interface whose thickness depends on the oxygen pressure and the substrate temperature during growth. Although lowering the oxygen vacancy concentration in SrTiO3 led to better insulating performance as indicated by the lowered leakage current density of the heterostructure, the dielectric performance was deteriorated because of the thickened interfacial layer that dominated the capacitance of SrTiO3/Si heterostructure. Instead of adjusting the oxygen vacancy concentration, we propose that controlling the film cation concentration is an effective way to tune the dielectric and insulating properties of SrTiO3/Si at the same time.
资助信息National Basic Research Program of China [2012CB921700]; National Natural Science Foundation of China [11225422]; US Natural Science Foundation [DMR-1106070]
语种英语
公开日期2014-01-16
源URL[http://ir.iphy.ac.cn/handle/311004/56885]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
Yang, F,Yang, ZZ,Li, WT,et al. Dielectric and insulating properties of SrTiO3/Si heterostructure controlled by cation concentration[J]. SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,2013,56(12):2404.
APA Yang, F.,Yang, ZZ.,Li, WT.,Li, FM.,Zhu, XT.,...&Guo, JD.(2013).Dielectric and insulating properties of SrTiO3/Si heterostructure controlled by cation concentration.SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,56(12),2404.
MLA Yang, F,et al."Dielectric and insulating properties of SrTiO3/Si heterostructure controlled by cation concentration".SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY 56.12(2013):2404.

入库方式: OAI收割

来源:物理研究所

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