Dielectric and insulating properties of SrTiO3/Si heterostructure controlled by cation concentration
文献类型:期刊论文
作者 | Yang, F ; Yang, ZZ ; Li, WT ; Li, FM ; Zhu, XT ; Gu, L ; Lee, HD ; Shubeita, S ; Xu, C ; Gustafsson, T ; Guo, JD |
刊名 | SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY
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出版日期 | 2013 |
卷号 | 56期号:12页码:2404 |
关键词 | oxide heterostructure oxide films film stoichiometry cation concentration interfacial layer |
ISSN号 | 1674-7348 |
通讯作者 | Guo, JD (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China. |
中文摘要 | SrTiO3 films with different cation concentration were deposited on Si(001) substrates by oxide molecular beam epitaxy. An amorphous layer was observed at the interface whose thickness depends on the oxygen pressure and the substrate temperature during growth. Although lowering the oxygen vacancy concentration in SrTiO3 led to better insulating performance as indicated by the lowered leakage current density of the heterostructure, the dielectric performance was deteriorated because of the thickened interfacial layer that dominated the capacitance of SrTiO3/Si heterostructure. Instead of adjusting the oxygen vacancy concentration, we propose that controlling the film cation concentration is an effective way to tune the dielectric and insulating properties of SrTiO3/Si at the same time. |
资助信息 | National Basic Research Program of China [2012CB921700]; National Natural Science Foundation of China [11225422]; US Natural Science Foundation [DMR-1106070] |
语种 | 英语 |
公开日期 | 2014-01-16 |
源URL | [http://ir.iphy.ac.cn/handle/311004/56885] ![]() |
专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
推荐引用方式 GB/T 7714 | Yang, F,Yang, ZZ,Li, WT,et al. Dielectric and insulating properties of SrTiO3/Si heterostructure controlled by cation concentration[J]. SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,2013,56(12):2404. |
APA | Yang, F.,Yang, ZZ.,Li, WT.,Li, FM.,Zhu, XT.,...&Guo, JD.(2013).Dielectric and insulating properties of SrTiO3/Si heterostructure controlled by cation concentration.SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,56(12),2404. |
MLA | Yang, F,et al."Dielectric and insulating properties of SrTiO3/Si heterostructure controlled by cation concentration".SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY 56.12(2013):2404. |
入库方式: OAI收割
来源:物理研究所
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