Low-Temperature, Directly Depositing Individual Single-Walled Carbon Nanotubes for Fabrication of Suspended Nanotube Devices
文献类型：期刊论文
| 作者 | Zhao, YC ; Liu, Z ; Liu, GT ; Zheng, KH ; Hu, LJ ; Ma, WJ ; Ren, Y ; Gu, CZ ; Xie, SS ; Sun, LF |
| 刊名 | JOURNAL OF PHYSICAL CHEMISTRY C
 |
| 出版日期 | 2013 |
| 卷号 | 117期号:31页码:16256 |
| ISSN号 | 1932-7447 |
| 通讯作者 | Zhao, YC (reprint author), Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China. |
| 中文摘要 | Single-walled carbon nanotubes (SWNTs) grown by chemical vapor deposition (CVD) are widely used for fabrication of high-performance nanotube devices. However, the high-temperature growth is incompatible with the current complementary metal-oxide semiconductor (CMOS) technology. We demonstrate a low-temperature and direct deposition of the CVD-grown SWNTs. The nanotubes are synthesized by floating catalytic CVD technique and further carried by the flowing gas directly to the low-temperature area. Individual SWNTs have been successfully deposited on Si/SiO2 substrates covered with a polymethylmethacrylate layer, which results in a suspended geometry of the nanotube in the fabricated devices. We subsequently investigate the electrical-transport properties of a representative small band gap nanotube, which exhibits an ambipolar feature with p-channel mobility up to 1410 cm(2) V-1 S-1 at room temperature. Furthermore, low-temperature measurements down to 4 K reveal different transport characteristics with the gate voltage biased near zero or at a large negative value, respectively. |
| 资助信息 | National Science Foundation of China [10774032, 90921001] |
| 语种 | 英语 |
| 公开日期 | 2014-01-16 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/57181]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhao, YC,Liu, Z,Liu, GT,et al. Low-Temperature, Directly Depositing Individual Single-Walled Carbon Nanotubes for Fabrication of Suspended Nanotube Devices[J]. JOURNAL OF PHYSICAL CHEMISTRY C,2013,117(31):16256. |
| APA | Zhao, YC.,Liu, Z.,Liu, GT.,Zheng, KH.,Hu, LJ.,...&Sun, LF.(2013).Low-Temperature, Directly Depositing Individual Single-Walled Carbon Nanotubes for Fabrication of Suspended Nanotube Devices.JOURNAL OF PHYSICAL CHEMISTRY C,117(31),16256. |
| MLA | Zhao, YC,et al."Low-Temperature, Directly Depositing Individual Single-Walled Carbon Nanotubes for Fabrication of Suspended Nanotube Devices".JOURNAL OF PHYSICAL CHEMISTRY C 117.31(2013):16256. |
入库方式： OAI收割
来源：物理研究所
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