Nanopillar array with a lambda/11 diameter fabricated by a kind of visible CW laser direct lithography system
文献类型：期刊论文
| 作者 | Zhang, C ; Wang, KG ; Bai, JT ; Wang, S ; Zhao, W ; Yang, F ; Gu, CZ ; Wang, GR |
| 刊名 | NANOSCALE RESEARCH LETTERS
 |
| 出版日期 | 2013 |
| 卷号 | 8 |
| 关键词 | Nanopillar Diffraction limit Lithography Coma Astigmatism |
| ISSN号 | 1931-7573 |
| 通讯作者 | Wang, KG (reprint author), NW Univ Xian, Inst Photon & Phototechnol, Int Sci & Technol Cooperat Base Photoelect Techno, 229 North Taibai Rd, Xian 710069, Peoples R China. |
| 中文摘要 | Nanoscale functional structures are indispensable elements in many fields of modern science. In this paper, nanopillar array with a pillar diameter far smaller than Abbe's diffraction limit is realized by a new kind of continuous wave (CW) laser direct lithography technology. With atomic force microscopy technology, the average diameter of nanopillars on thin OIR906 photoresist film is about 65 nm and the smallest diameter is 48 nm, which is about 1/11 of the incident laser wavelength. Also, the influences of coma and astigmatism effects to the shape and size of nanopillar are numerically simulated by utilizing vector integral. As far as we know, it is the first time that nanopillar array is implemented by a donut-shaped 532-nm visible CW laser. The study presents a new, simple, inexpensive, and effective approach for nanopillar/pore array fabrication. |
| 资助信息 | Major Research Plan of the Natural Science Foundation of China [91123030]; International Science and Technology Cooperation Program of China [2011DFA12220] |
| 语种 | 英语 |
| 公开日期 | 2014-01-16 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/57238]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, C,Wang, KG,Bai, JT,et al. Nanopillar array with a lambda/11 diameter fabricated by a kind of visible CW laser direct lithography system[J]. NANOSCALE RESEARCH LETTERS,2013,8. |
| APA | Zhang, C.,Wang, KG.,Bai, JT.,Wang, S.,Zhao, W.,...&Wang, GR.(2013).Nanopillar array with a lambda/11 diameter fabricated by a kind of visible CW laser direct lithography system.NANOSCALE RESEARCH LETTERS,8. |
| MLA | Zhang, C,et al."Nanopillar array with a lambda/11 diameter fabricated by a kind of visible CW laser direct lithography system".NANOSCALE RESEARCH LETTERS 8(2013). |
入库方式： OAI收割
来源：物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。