Piezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering
文献类型：期刊论文
| 作者 | Lu, HL ; Song, SQ ; Gu, XF ; He, SL ; Chen, CL ; Song, GB ; Cai, ZH ; Guo, HM ; Gao, HJ ; Sun, L |
| 刊名 | JOURNAL OF NANO RESEARCH
 |
| 出版日期 | 2013 |
| 卷号 | 22页码:23 |
| 关键词 | Ferroelectric Thin Film BaTiO3 Magnetron Sputtering |
| ISSN号 | 1662-5250 |
| 通讯作者 | Lu, HL (reprint author), Univ Houston, Dept Mech Engn, Houston, TX 77204 USA. |
| 中文摘要 | Direct integration of ferroelectrics with semiconductors is critical to lower the cost and simplify the production procedures for data storage/processing components and miniature sensor/actuator development. By optimizing magnetron sputtering parameters, highly <001> preferential growth of BaTiO3 thin films with reproducible ferroelectric responses have been achieved on Si(001) substrates. The thin film ferroelectric characteristics were systematically studied by piezoresponse force microscopy, and a piezoelectric coefficient d(33) of 24pm/V has been measured. It is found that the scanning tip sidewall angle and cantilever tilt affect the contour and size of polarized area. |
| 资助信息 | DOD TATRC award through the Alliance for Nano Health [W81XWH-09-2-0139]; 111 Project [B12018]; PAPD of Jiangsu Higher Education Institutions; U.S. Department of Energy Sciences, Office of Science [W-31-109-ENG-38] |
| 语种 | 英语 |
| 公开日期 | 2014-01-16 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/57340]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Lu, HL,Song, SQ,Gu, XF,et al. Piezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering[J]. JOURNAL OF NANO RESEARCH,2013,22:23. |
| APA | Lu, HL.,Song, SQ.,Gu, XF.,He, SL.,Chen, CL.,...&Sun, L.(2013).Piezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering.JOURNAL OF NANO RESEARCH,22,23. |
| MLA | Lu, HL,et al."Piezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering".JOURNAL OF NANO RESEARCH 22(2013):23. |
入库方式： OAI收割
来源：物理研究所
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