Atomic Layer Deposition of BiFeO3 Thin Films Using β_ Diketonates and H2O
文献类型：期刊论文
| 作者 | Feng Zhang , Guosheng Sun , Wanshun Zhao , Lei Wang , Liu Zheng , Shengbei Liu , Bin Liu , Lin Dong , Xingfang Liu , Guoguo Yan , Lixin Tian , and Yiping Zeng |
| 刊名 | J. Phys. Chem. C
 |
| 出版日期 | 2013 |
| 卷号 | 117页码:24579–24585 |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2014-03-19 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/24556]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Feng Zhang , Guosheng Sun , Wanshun Zhao , Lei Wang , Liu Zheng , Shengbei Liu , Bin Liu , Lin Dong , Xingfang Liu , Guoguo Yan , Lixin Tian , and Yiping Zeng. Atomic Layer Deposition of BiFeO3 Thin Films Using β_ Diketonates and H2O[J]. J. Phys. Chem. C,2013,117:24579–24585. |
| APA | Feng Zhang , Guosheng Sun , Wanshun Zhao , Lei Wang , Liu Zheng , Shengbei Liu , Bin Liu , Lin Dong , Xingfang Liu , Guoguo Yan , Lixin Tian , and Yiping Zeng.(2013).Atomic Layer Deposition of BiFeO3 Thin Films Using β_ Diketonates and H2O.J. Phys. Chem. C,117,24579–24585. |
| MLA | Feng Zhang , Guosheng Sun , Wanshun Zhao , Lei Wang , Liu Zheng , Shengbei Liu , Bin Liu , Lin Dong , Xingfang Liu , Guoguo Yan , Lixin Tian , and Yiping Zeng."Atomic Layer Deposition of BiFeO3 Thin Films Using β_ Diketonates and H2O".J. Phys. Chem. C 117(2013):24579–24585. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。