Investigation of the wet-etching mechanism of Ga-polar AlGaNGaN micro-pillars
文献类型：期刊论文
| ; | |
| 作者 | Junjie Kang, Zhi Li, Zhiqiang Liu, Hongjian Li, Yongbing Zhao, Yingdong Tian, Ping Ma, Xiaoyan Yi, Guohong Wang |
| 刊名 | journal of crystal growth
 ; Journal of Crystal Growth
|
| 出版日期 | 2013 ; 2013 |
| 卷号 | 386页码:175–178 |
| 学科主题 | 半导体器件 ; 半导体器件 |
| 收录类别 | SCI |
| 语种 | 英语 ; 英语 |
| 公开日期 | 2014-04-09 ; 2014-04-09 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/24772]  |
| 专题 | 半导体研究所_中科院半导体照明研发中心 |
| 推荐引用方式 GB/T 7714 | Junjie Kang, Zhi Li, Zhiqiang Liu, Hongjian Li, Yongbing Zhao, Yingdong Tian, Ping Ma, Xiaoyan Yi, Guohong Wang. Investigation of the wet-etching mechanism of Ga-polar AlGaNGaN micro-pillars, Investigation of the wet-etching mechanism of Ga-polar AlGaNGaN micro-pillars[J]. journal of crystal growth, Journal of Crystal Growth,2013, 2013,386, 386:175–178, 175–178. |
| APA | Junjie Kang, Zhi Li, Zhiqiang Liu, Hongjian Li, Yongbing Zhao, Yingdong Tian, Ping Ma, Xiaoyan Yi, Guohong Wang.(2013).Investigation of the wet-etching mechanism of Ga-polar AlGaNGaN micro-pillars.journal of crystal growth,386,175–178. |
| MLA | Junjie Kang, Zhi Li, Zhiqiang Liu, Hongjian Li, Yongbing Zhao, Yingdong Tian, Ping Ma, Xiaoyan Yi, Guohong Wang."Investigation of the wet-etching mechanism of Ga-polar AlGaNGaN micro-pillars".journal of crystal growth 386(2013):175–178. |
入库方式： OAI收割
来源：半导体研究所
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