Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram
文献类型：期刊论文
| 作者 | Han, Guowei ; Si, Chaowei ; Ning, Jing ; Zhao, Yongmei ; Sun, Guosheng ; Yang, Fuhua |
| 刊名 | advanced materials research
 |
| 出版日期 | 2013 |
| 卷号 | 677页码:74-78 |
| 学科主题 | 微电子学 |
| 收录类别 | EI |
| 语种 | 英语 |
| 公开日期 | 2014-05-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/24886]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Han, Guowei,Si, Chaowei,Ning, Jing,et al. Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram[J]. advanced materials research,2013,677:74-78. |
| APA | Han, Guowei,Si, Chaowei,Ning, Jing,Zhao, Yongmei,Sun, Guosheng,&Yang, Fuhua.(2013).Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram.advanced materials research,677,74-78. |
| MLA | Han, Guowei,et al."Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram".advanced materials research 677(2013):74-78. |
入库方式： OAI收割
来源：半导体研究所
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