Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor
文献类型：期刊论文
| 作者 | Xu Mao ; Zhiqiang Fang ; Zhe Zhang ; Jinling Yan ; Zhimei Qi ; Fuhua Yang |
| 刊名 | nano/micro engineered and molecular systems (nems), 2013 8th ieee international conference on
 |
| 出版日期 | 2013 |
| 页码 | 244-247 |
| 学科主题 | 微电子学 |
| 收录类别 | EI |
| 语种 | 英语 |
| 公开日期 | 2014-05-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/24919]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Xu Mao,Zhiqiang Fang,Zhe Zhang,et al. Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor[J]. nano/micro engineered and molecular systems (nems), 2013 8th ieee international conference on,2013:244-247. |
| APA | Xu Mao,Zhiqiang Fang,Zhe Zhang,Jinling Yan,Zhimei Qi,&Fuhua Yang.(2013).Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor.nano/micro engineered and molecular systems (nems), 2013 8th ieee international conference on,244-247. |
| MLA | Xu Mao,et al."Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor".nano/micro engineered and molecular systems (nems), 2013 8th ieee international conference on (2013):244-247. |
入库方式： OAI收割
来源：半导体研究所
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