Low energy solid intense ion beams extracted by electron beam evaporation ion source for material modifications
文献类型：期刊论文
| 作者 | Feng YC(冯毓才) ; Wong, S. P. |
| 刊名 | Review of Scientific Instruments
 |
| 出版日期 | 1998 |
| 卷号 | 69期号:7页码:2644-2646 |
| ISSN号 | 0034-6748 |
| 通讯作者 | 北京8701信箱 |
| 英文摘要 | An investigation to reduce the energy of the solid ion beam extracted from electron beam evaporation ion source for material modifications has been performed. The preliminary results have shown that the beam energy can be reduced to lower than 100 eV by a specially designed extraction system for carbon and nitrogen mixed ion beams. The beam current extracted is up to 30 mA for a small 20 mm extraction diameter ion source. It has been found that the extraction energy can be controlled by adjusting the bias voltage of the sample used for coating and the crucible potential, The extraction capability and the composition of the ion beam can also be controlled by changing the gas flow rate and the input power of the ion source. For carbon nitride films synthesized at low energy by this system, the results have shown to exhibit very high hardness values. The microhardness is over HK 6000 kg/mm(2). The principle of this ion source is described. The structure of the ion source, and the experimental results are also described in this article. |
| 学科主题 | 空间技术 |
| 收录类别 | SCI |
| 原文出处 | |
| 语种 | 英语 |
| 源URL | [http://ir.cssar.ac.cn/handle/122/577]  |
| 专题 | 国家空间科学中心_空间技术部 |
| 推荐引用方式 GB/T 7714 | Feng YC,Wong, S. P.. Low energy solid intense ion beams extracted by electron beam evaporation ion source for material modifications[J]. Review of Scientific Instruments,1998,69(7):2644-2646. |
| APA | 冯毓才,&Wong, S. P..(1998).Low energy solid intense ion beams extracted by electron beam evaporation ion source for material modifications.Review of Scientific Instruments,69(7),2644-2646. |
| MLA | 冯毓才,et al."Low energy solid intense ion beams extracted by electron beam evaporation ion source for material modifications".Review of Scientific Instruments 69.7(1998):2644-2646. |
入库方式： OAI收割
来源：国家空间科学中心
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