Microstructure formation in a thick polymer by electrostatic-induced lithography
文献类型：期刊论文
| 作者 | Gao J. ; Liu G.
|
| 刊名 | Journal of Micromechanics and Microengineering
 |
| 出版日期 | 2013 |
| 卷号 | 23期号:3 |
| ISSN号 | ISBN/0960-1317 |
| 英文摘要 | This article demonstrates the manufacturing of microstructures in a thick polymer using electrostatic-induced lithography. Unlike previous work reported elsewhere, it focuses on the fabrication of structures from meso-to micro-scale. The electrostatic-induced lithography technique is proven to work with not only dc voltage but also ac voltage. Microstructures including microchannels, sinusoidal surface profile microstructures, waveguide core, microlens array and binary Fresnel zone plate have been successfully fabricated. The aspect ratio obtained for some samples is up to 4.5:1. The whole fabrication process is fast, cost-effective in terms of the simple experimental setup and no photosensitive material is needed. This process is expected to find applications in microfluidics, photonics or micro-opto-electro-mechanical systems. |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| 公开日期 | 2014-05-14 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/40752]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Gao J.,Liu G.. Microstructure formation in a thick polymer by electrostatic-induced lithography[J]. Journal of Micromechanics and Microengineering,2013,23(3). |
| APA | Gao J.,&Liu G..(2013).Microstructure formation in a thick polymer by electrostatic-induced lithography.Journal of Micromechanics and Microengineering,23(3). |
| MLA | Gao J.,et al."Microstructure formation in a thick polymer by electrostatic-induced lithography".Journal of Micromechanics and Microengineering 23.3(2013). |
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