Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68 degrees-74 degrees)
文献类型：期刊论文
| 作者 | Li C.
|
| 刊名 | Journal of the Optical Society of America a-Optics Image Science and Vision
 |
| 出版日期 | 2013 |
| 卷号 | 30期号:9 |
| ISSN号 | ISBN/1084-7529 |
| 英文摘要 | Most of the optical axes in modern systems are bent for optomechanical considerations. Antireflection (AR) coatings for polarized light at oblique incidence are widely used in optical surfaces like prisms or multiform lenses to suppress undesirable reflections. The optimal design and fabrication method for AR coatings with large-angle range (68 degrees - 74 degrees) for a P-polarized 193 nm laser beam is discussed in detail. Experimental results showed that after coating, the reflection loss of a P-polarized laser beam at large angles of incidence on the optical surfaces is reduced dramatically, which could greatly improve the output efficiency of the optical components in the deep ultraviolet vacuum range. (C) 2013 Optical Society of America |
| 收录类别 | SCI |
| 公开日期 | 2014-05-14 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/40798]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Li C.. Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68 degrees-74 degrees)[J]. Journal of the Optical Society of America a-Optics Image Science and Vision,2013,30(9). |
| APA | Li C..(2013).Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68 degrees-74 degrees).Journal of the Optical Society of America a-Optics Image Science and Vision,30(9). |
| MLA | Li C.."Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68 degrees-74 degrees)".Journal of the Optical Society of America a-Optics Image Science and Vision 30.9(2013). |
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