Optical performance, structure and thermal stability of Al/Zr multilayers working at above 17nm
文献类型：会议论文
| 作者 | Wang Z.; Wang Z. |
| 出版日期 | 2013 |
| 会议名称 | Damage to VUV, EUV, and X-Ray Optics IV; and EUV and X-Ray Optics: Synergy Between Laboratory and Space III, April 15, 2013 - April 18, 2013 |
| 会议地点 | Prague, Czech republic |
| 英文摘要 | We report on further development of the optical, structural performances and temporal stability of Al(1%wtSi)/Zr multilayers. The multilayers with variable periods (from 10 to 80) are fitted by four-layer model. Below 40 periods, the surface and interfacial roughnesses are increased with the period numbers, but not decrease the reflectivity of Al(1%wtSi)/Zr multilayers. Above 40 periods, such as 80 periods, the reflectivity is down to 34.7% due to larger roughness and worse interfacial boundary. To improve the reflectivity, we modify some parameters during deposition process. The results in the EUV reflectivity show that the reflectivity of the sample with 40 periods is increased from 41.2% to 48.2%. The temporal stability of Al(1%wtSi)/Zr samples with different annealing temperatures has been observed over 35 days. 2013 SPIE. |
| 收录类别 | EI |
| 会议录 | Damage to VUV, EUV, and X-Ray Optics IV; and EUV and X-Ray Optics: Synergy Between Laboratory and Space III, April 15, 2013 - April 18, 2013
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| 会议录出版者 | SPIE |
| 会议录出版地 | Prague, Czech republic |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/41054]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文 |
| 推荐引用方式 GB/T 7714 | Wang Z.,Wang Z.. Optical performance, structure and thermal stability of Al/Zr multilayers working at above 17nm[C]. 见:Damage to VUV, EUV, and X-Ray Optics IV; and EUV and X-Ray Optics: Synergy Between Laboratory and Space III, April 15, 2013 - April 18, 2013. Prague, Czech republic. |
入库方式： OAI收割
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