Fabrication of micro-structural ZnO crystal and the concentration fields of the CVD reactor
文献类型：会议论文
| 作者 | Xu, J. B. ; Tian, H. J. ; Tian, Y. J. ; Wen, H. |
| 出版日期 | 2013 |
| 会议名称 | 3rd International Conference on Advanced Engineering Materials and Technology (AEMT 2013) |
| 会议日期 | MAY 11-12, 2013 |
| 会议地点 | Zhangjiajie, PEOPLES R CHINA |
| 关键词 | CVD ZnO crystals Computational fluid dynamics Flow field analysis PHOTOLUMINESCENCE PROPERTIES OPTICAL-PROPERTIES CONTROLLED GROWTH VAPOR-DEPOSITION THIN-FILMS NANOSTRUCTURES ARRAYS MORPHOLOGY TEMPERATURE NANORODS |
| 页码 | 352-357 |
| 中文摘要 | Arrayed ZnO crystals were fabricated with Zn as raw material by thermal chemical vapor deposition in a tubular reactor. The characterizations indicate the product grown at upstream is the well-arrayed ZnO submicro-column with good crystal properties, that at downstream is well-arrayed nano-needle with more defects. In combination of mass field analysis with Fluent, it is revealed that the concentration fields at the upstream and downstream positions of Zn source are not identical even in an identical temperature field. It is the diffusion that drives Zn vapor move to upstream position where the O-2 is rich, and the amount diffuse to upstream is rare due to the transportation of working gas. Most of O-2 is consumed when passes the Zn source, leading to more lean O-2 but rich Zn at the downstream position of Zn source. Our results support that lower concentration of Zn and O-2 is in favor of the formation of perfect crystal as happened at upstream, but in such condition that more Zn and rare O-2, defects of O vacancy is liable to form during ZnO growth. |
| 收录类别 | CPCI |
| 会议网址 | |
| 会议录 | ADVANCED ENGINEERING MATERIALS III, PTS 1-3
 |
| 会议录出版者 | Trans Tech Publications Ltd |
| 语种 | 英语 |
| 源URL | [http://ir.ipe.ac.cn/handle/122111/11265]  |
| 专题 | 过程工程研究所_研究所（批量导入） |
| 推荐引用方式 GB/T 7714 |
Xu, J. B.,Tian, H. J.,Tian, Y. J.,et al. Fabrication of micro-structural ZnO crystal and the concentration fields of the CVD reactor[C]. 见:3rd International Conference on Advanced Engineering Materials and Technology (AEMT 2013). Zhangjiajie, PEOPLES R CHINA. MAY 11-12, 2013. |
入库方式： OAI收割
来源：过程工程研究所
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