Femtosecond multi-beam interference lithography based on dynamic wavefront engineering
文献类型：期刊论文
| 作者 | Zhou, Qiang1,2; Yang, Wenzheng1 ; He, Fengtao2; Stoian, Razvan3; Hui, Rongqing4; Cheng, Guanghua1,3
|
| 刊名 | optics express
 |
| 出版日期 | 2013-04-22 |
| 卷号 | 21期号:8页码:9851-9861 |
| ISSN号 | 1094-4087 |
| 英文摘要 | a method for precise multi-spot parallel ultrafast laser material structuring is presented based on multi-beam interference generated by dynamic spatial phase engineering. a spatial light modulator (slm) and digitally programming of phase masks are used to accomplish the function of a multi-facet pyramid lens, so that the laser beam can be spatially modulated to create beam multiplexing and desired two-dimensional (2d) multi-beam interference patterns. various periodic microstructures on metallic alloy surfaces are fabricated with this technique. a method of preparing extended scale periodic microstructures by loading dynamic time-varying phases is also demonstrated. scanning electron microscopy (sem) reveals the period and morphology of the microstructures created using this technique. the asymmetry of interference modes generated from the beams with asymmetric wave vector distributions is equally explored. the flexibility of programming the period of the microstructures is demonstrated. (c) 2013 optical society of america |
| WOS标题词 | science & technology ; physical sciences |
| 类目[WOS] | optics |
| 研究领域[WOS] | optics |
| 关键词[WOS] | spatial light-modulator ; photonic crystals ; holographic lithography ; periodic structures ; laser-pulses ; fabrication ; microstructures ; gratings ; glass |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000318151600062 |
| 公开日期 | 2014-09-17 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/21864]  |
| 专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
| 作者单位 | 1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Shaanxi, Peoples R China 2.Xian Univ Post & Telecommun, Sch Electron & Engn, Xian 710121, Shaanxi, Peoples R China 3.Univ St Etienne, Univ Lyon, Lab Hubert Curien, CNRS,UMR 5516, F-42000 St Etienne, France 4.Univ Kansas, Dept Elect Engn & Comp Sci, Lawrence, KS 66044 USA |
| 推荐引用方式 GB/T 7714 | Zhou, Qiang,Yang, Wenzheng,He, Fengtao,et al. Femtosecond multi-beam interference lithography based on dynamic wavefront engineering[J]. optics express,2013,21(8):9851-9861. |
| APA | Zhou, Qiang,Yang, Wenzheng,He, Fengtao,Stoian, Razvan,Hui, Rongqing,&Cheng, Guanghua.(2013).Femtosecond multi-beam interference lithography based on dynamic wavefront engineering.optics express,21(8),9851-9861. |
| MLA | Zhou, Qiang,et al."Femtosecond multi-beam interference lithography based on dynamic wavefront engineering".optics express 21.8(2013):9851-9861. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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