Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force
文献类型：期刊论文
| 作者 | Guo JG(郭建刚) ; Zhou LJ; Zhao YP(赵亚溥); Zhao YP
|
| 刊名 | Journal of Colloid and Interface Science
 |
| 出版日期 | 2009 |
| 卷号 | 331期号:2页码:458-462 |
| 通讯作者邮箱 | yzhao@imech.ac.cn |
| 关键词 | Torsional Nems Actuator Capillary Force Instability Bifurcation Nanoscale Electrostatic Actuators Van-Der-Waals Casimir Force Stability Behavior Plates |
| ISSN号 | 0021-9797 |
| 通讯作者 | Zhao YP |
| 中文摘要 | The static and dynamic instabilities of a torsional MEMS/NEMS actuator caused by capillary effects are studied, respectively. An instability number, eta, is defined, and the critical gap distance, g(cr), between the mainplate and the substrate is derived. According to the values of eta and g, the instability criteria of the actuator are presented. The dimensionless motion equation of the MEMS/NEMS torsional actuator is derived when it makes nonlinear oscillation under capillary force. The qualitative analysis of the nonlinear equation is made, and the phase portraits are presented on the phase plane. In addition, the bifurcation phenomena in the system are also analyzed. (C) 2008 Elsevier Inc. All rights reserved. |
| 类目[WOS] | Chemistry, Physical |
| 研究领域[WOS] | Chemistry |
| 关键词[WOS] | NANOSCALE ELECTROSTATIC ACTUATORS ; VAN-DER-WAALS ; CASIMIR FORCE ; STABILITY ; BEHAVIOR ; PLATES |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000263335700030 |
| 公开日期 | 2009-08-03 ; 2009-10-09 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/26618]  |
| 专题 | 力学研究所_非线性力学国家重点实验室 |
| 通讯作者 | Zhao YP |
| 推荐引用方式 GB/T 7714 | Guo JG,Zhou LJ,Zhao YP,et al. Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force[J]. Journal of Colloid and Interface Science,2009,331(2):458-462. |
| APA | 郭建刚,Zhou LJ,赵亚溥,&Zhao YP.(2009).Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force.Journal of Colloid and Interface Science,331(2),458-462. |
| MLA | 郭建刚,et al."Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force".Journal of Colloid and Interface Science 331.2(2009):458-462. |
入库方式： OAI收割
来源：力学研究所
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