Integration method for directly analyzing interface statistics of periodic multilayers from X-ray scattering
文献类型：期刊论文
| 作者 | Li, HC ; Zhu, JT ; Wang, ZS ; Chen, H ; Wang, YZ ; Wang, J |
| 刊名 | JOURNAL OF SYNCHROTRON RADIATION
 |
| 出版日期 | 2014 |
| 卷号 | 21页码:97—103 |
| 关键词 | SPUTTERING PRESSURE DIFFUSE-SCATTERING ROUGHNESS PERFORMANCE SURFACE FILM |
| ISSN号 | 0909-0495 |
| 通讯作者 | jtzhu@tongji.edu.cn |
| 英文摘要 | An integration method is demonstrated for directly determining the average interface statistics of periodic multilayers from the X-ray scattering diagram. By measuring the X-ray scattering diagram in the out-of-plane geometry and integrating the scattered intensity along the vertical momentum transfer q(z) in an interval, which is decided by the thickness ratio Gamma (ratio of sublayer's thickness to periodic thickness), the cross-correlations between different interfaces are canceled and only the autocorrelations are reserved. Then the multilayer can be treated as a 'single interface' and the average power spectral density can be obtained without assuming any vertical correlation model. This method has been employed to study the interface morphology of sputter-deposited W/Si multilayers grown at an Ar pressure of 1-7 mTorr. The results show an increase in vertical correlation length and a decrease in lateral correlation length with increased Ar pressure. The static roughness exponent alpha = 0 and dynamic growth exponent z = 2 indicate the Edwards-Wilkinson growth model at an Ar pressure of 1-5 mTorr. At an Ar pressure of 7 mTorr, alpha = 0.35 and z = 1.65 indicate the Kardar-Parisi-Zhang growth model. |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000328939400012 |
| 公开日期 | 2015-03-13 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/14199]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 推荐引用方式 GB/T 7714 | Li, HC,Zhu, JT,Wang, ZS,et al. Integration method for directly analyzing interface statistics of periodic multilayers from X-ray scattering[J]. JOURNAL OF SYNCHROTRON RADIATION,2014,21:97—103. |
| APA | Li, HC,Zhu, JT,Wang, ZS,Chen, H,Wang, YZ,&Wang, J.(2014).Integration method for directly analyzing interface statistics of periodic multilayers from X-ray scattering.JOURNAL OF SYNCHROTRON RADIATION,21,97—103. |
| MLA | Li, HC,et al."Integration method for directly analyzing interface statistics of periodic multilayers from X-ray scattering".JOURNAL OF SYNCHROTRON RADIATION 21(2014):97—103. |
入库方式： OAI收割
来源：上海应用物理研究所
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