Growth of micro-devices of topological insulator thin films by molecular beam epitaxy on substrates pre-patterned with photolithography
文献类型：期刊论文
| 作者 | Wei, P ; Li, K ; Feng, X ; Ou, YB ; Zhang, LG ; Wang, LL ; He, K ; Ma, XC ; Xue, QK |
| 刊名 | ACTA PHYSICA SINICA
 |
| 出版日期 | 2014 |
| 卷号 | 63期号:2 |
| 关键词 | topological insulator SrTiO3 phtotolithography Hall effect |
| ISSN号 | 1000-3290 |
| 通讯作者 | He, K (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China. |
| 中文摘要 | In the fabrication of micrometer-sized structures from an epitaxial topological insulator thin film with photolithography, the film is usually deteriorated by the chemicals used in the process. By molecular beam epitaxy of (Bi-x Sb1-x)(2)Te-3 topological insulator onto Hall bar-shaped plateaus pre-lithographed on SrTiO3 substrate, we have directly prepared Hall bar devices of epitaxial topological insulator thin film, avoiding the degradation of film quality in photolithography. Atomic force microscope and transport measurements have demonstrated that the Hall bar devices have the similar properties as that of (BixSb1-x)(2)Te-3 films epitaxied on ordinary SrTiO3 substrates. The new microfabrication method can not only help to realize various novel quantum phenomena predicted in topological insulators but be applied to other epitaxial low-dimensional systems as well. |
| 资助信息 | National Natural Science Foundation of China [11174343, 11134008] |
| 语种 | 英语 |
| 公开日期 | 2015-04-14 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/58817]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wei, P,Li, K,Feng, X,et al. Growth of micro-devices of topological insulator thin films by molecular beam epitaxy on substrates pre-patterned with photolithography[J]. ACTA PHYSICA SINICA,2014,63(2). |
| APA | Wei, P.,Li, K.,Feng, X.,Ou, YB.,Zhang, LG.,...&Xue, QK.(2014).Growth of micro-devices of topological insulator thin films by molecular beam epitaxy on substrates pre-patterned with photolithography.ACTA PHYSICA SINICA,63(2). |
| MLA | Wei, P,et al."Growth of micro-devices of topological insulator thin films by molecular beam epitaxy on substrates pre-patterned with photolithography".ACTA PHYSICA SINICA 63.2(2014). |
入库方式： OAI收割
来源：物理研究所
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