Suppressing the spread length of threading dislocations in AlSb/GaSb superlattice grown on (001) InP substrate
文献类型：期刊论文
| 作者 | Shi, ZW ; Wang, L ; Cui, YX ; Liu, HG ; Tian, HT ; Wang, WX ; Chen, H |
| 刊名 | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
 |
| 出版日期 | 2014 |
| 卷号 | 115期号:4页码:1239 |
| ISSN号 | 0947-8396 |
| 通讯作者 | Wang, L (reprint author), Chinese Acad Sci, Inst Phys, Natl Lab Condensed Matter Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | Two designed structures of ternary Al0.5Ga0.5Sb and AlSb/GaSb superlattice (SL) buffers were prepared by molecular beam epitaxy. Double crystal X-Ray diffraction (XRD) and transmission electron microscopy (TEM) were used to characterize the material quality and observe the threading dislocation (TD) spreading behaviors. It was found that despite the wider full width at half-maximum (FWHM) of the w-rocking curve obtained in the SL buffer compared with the AlGaSb buffer, the stronger the TD filter ability enabled the SL buffer to block the defects to beneath the thickness around 500 nm. This result suggests the AlSb/GaSb SL buffer possessed the superiority in the fabrication of antimony (Sb) based microelectronic devices. |
| 资助信息 | Natural Science Foundation of China [61106013, 61275107, 11104226]; National High Technology Research and Development Program of China [2009AA033101]; National Basic Research Program of China [2010CB327501, 2011CB925604] |
| 语种 | 英语 |
| 公开日期 | 2015-04-14 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/58865]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Shi, ZW,Wang, L,Cui, YX,et al. Suppressing the spread length of threading dislocations in AlSb/GaSb superlattice grown on (001) InP substrate[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,2014,115(4):1239. |
| APA | Shi, ZW.,Wang, L.,Cui, YX.,Liu, HG.,Tian, HT.,...&Chen, H.(2014).Suppressing the spread length of threading dislocations in AlSb/GaSb superlattice grown on (001) InP substrate.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,115(4),1239. |
| MLA | Shi, ZW,et al."Suppressing the spread length of threading dislocations in AlSb/GaSb superlattice grown on (001) InP substrate".APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 115.4(2014):1239. |
入库方式： OAI收割
来源：物理研究所
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