Multiple primary aberrations effect on donut-shaped laser beam in high NA focusing system
文献类型：期刊论文
| 作者 | Zhang, C ; Wang, KG ; Wang, S ; Liu, Y ; Zhao, W ; Chen, XM ; Lu, BL ; Gu, CZ ; Sun, Y ; Wang, GR ; Bai, JT |
| 刊名 | JOURNAL OF OPTICS
 |
| 出版日期 | 2014 |
| 卷号 | 16期号:12 |
| 关键词 | donut-shaped multiple aberrations vector diffraction theory focusing system nano-pattern |
| ISSN号 | 2040-8978 |
| 通讯作者 | Zhang, C (reprint author), NW Univ Xian, Inst Photon & Photon Technol, Xian 710069, Peoples R China. |
| 中文摘要 | A donut-shaped laser that is simultaneously impacted by the coma, astigmatism and spherical aberrations in a high NA focusing system is numerically simulated based on the vectorial diffraction theory. The full-width half-maximum, intensity characters, and dimensions of the dark cores of the donut-shaped laser on the focal plane are quantitatively analyzed. The results are highly consistent with the annular-shaped nano-patterns that are experimentally fabricated by our purpose-built laser direct writing system. The mechanism of asymmetric nano-patterns fabricated through laser writing lithography is also revealed. |
| 资助信息 | Major Research Plan of the Natural Science Foundation of China [91123030, 61378083]; International Science & Technology Cooperation Program of China [2011DFA12220]; NSF's MRI, USA [CBET-1040227] |
| 语种 | 英语 |
| 公开日期 | 2015-04-14 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/59241]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, C,Wang, KG,Wang, S,et al. Multiple primary aberrations effect on donut-shaped laser beam in high NA focusing system[J]. JOURNAL OF OPTICS,2014,16(12). |
| APA | Zhang, C.,Wang, KG.,Wang, S.,Liu, Y.,Zhao, W.,...&Bai, JT.(2014).Multiple primary aberrations effect on donut-shaped laser beam in high NA focusing system.JOURNAL OF OPTICS,16(12). |
| MLA | Zhang, C,et al."Multiple primary aberrations effect on donut-shaped laser beam in high NA focusing system".JOURNAL OF OPTICS 16.12(2014). |
入库方式： OAI收割
来源：物理研究所
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