A large-area 15 nm graphene nanoribbon array patterned by a focused ion beam
文献类型：期刊论文
| 作者 | Zhang, Y ; Hui, C ; Sun, RJ ; Li, K ; He, K ; Ma, XC ; Liu, F |
| 刊名 | NANOTECHNOLOGY
 |
| 出版日期 | 2014 |
| 卷号 | 25期号:13 |
| 关键词 | graphene nanoribbon focused ion beam photodetector epitaxial graphene Monte Carlo |
| ISSN号 | 0957-4484 |
| 通讯作者 | Zhang, Y (reprint author), Univ Utah, Dept Mat Sci & Engn, Salt Lake City, UT 84112 USA. |
| 中文摘要 | Using a focused ion beam, we patterned epitaxial graphene on SiC into an array of graphene nanoribbons as narrow as 15 nm by optimizing the Ga+ ion beam current, acceleration voltage, dwell time, beam center-to-center distance and ion dose. The ion dose required to completely etch away graphene on SiC was determined and compared with the Monte Carlo simulation result. In addition, a photodetector using an array of 300 20 nm graphene nanoribbons was fabricated and its photoresponse was studied. |
| 资助信息 | Solan, LLC.; DOE [DEFG02-04ER46148] |
| 语种 | 英语 |
| 公开日期 | 2015-04-14 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/59371]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, Y,Hui, C,Sun, RJ,et al. A large-area 15 nm graphene nanoribbon array patterned by a focused ion beam[J]. NANOTECHNOLOGY,2014,25(13). |
| APA | Zhang, Y.,Hui, C.,Sun, RJ.,Li, K.,He, K.,...&Liu, F.(2014).A large-area 15 nm graphene nanoribbon array patterned by a focused ion beam.NANOTECHNOLOGY,25(13). |
| MLA | Zhang, Y,et al."A large-area 15 nm graphene nanoribbon array patterned by a focused ion beam".NANOTECHNOLOGY 25.13(2014). |
入库方式： OAI收割
来源：物理研究所
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