TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating
文献类型：期刊论文
| 作者 | Y. H. ; Guo Zhao, C. Q. ; Yang, W. J. ; Chen, Y. Q. ; Yu, B. H. |
| 刊名 | Vacuum
 |
| 出版日期 | 2015 |
| 卷号 | 112页码:46-54 |
| 关键词 | Magnetic field Arc ion plating Stainless-steel tube Inner wall TiN films cathodic vacuum-arc interior surface inner wall carbon-films thin-films substrate-temperature residual-stresses vapor-deposition current-density pvd coatings |
| ISSN号 | 0042-207X |
| 原文出处 | |
| 公开日期 | 2015-05-08 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/74038]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Y. H.,Guo Zhao, C. Q.,Yang, W. J.,et al. TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating[J]. Vacuum,2015,112:46-54. |
| APA | Y. H.,Guo Zhao, C. Q.,Yang, W. J.,Chen, Y. Q.,&Yu, B. H..(2015).TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating.Vacuum,112,46-54. |
| MLA | Y. H.,et al."TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating".Vacuum 112(2015):46-54. |
入库方式： OAI收割
来源：金属研究所
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