Mechanical behavior related to various bonding states in amorphous Si-C-N hard films
文献类型：期刊论文
| 作者 | C. Q. ; Schlemper Zhuang, C. ; Fuchs, R. ; Zhang, L. ; Huang, N. ; Vogel, M. ; Staedler, T. ; Jiang, X. |
| 刊名 | Surface & Coatings Technology
 |
| 出版日期 | 2014 |
| 卷号 | 258页码:353-358 |
| 关键词 | Si-C-N coatings Chemical bond Mechanical behavior silicon carbonitride films pulsed-laser deposition chemical-vapor-deposition nitride thin-films optical-properties surface-morphology band-gap alloys microstructure coatings |
| ISSN号 | 0257-8972 |
| 原文出处 | |
| 公开日期 | 2015-05-08 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/74046]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | C. Q.,Schlemper Zhuang, C.,Fuchs, R.,et al. Mechanical behavior related to various bonding states in amorphous Si-C-N hard films[J]. Surface & Coatings Technology,2014,258:353-358. |
| APA | C. Q..,Schlemper Zhuang, C..,Fuchs, R..,Zhang, L..,Huang, N..,...&Jiang, X..(2014).Mechanical behavior related to various bonding states in amorphous Si-C-N hard films.Surface & Coatings Technology,258,353-358. |
| MLA | C. Q.,et al."Mechanical behavior related to various bonding states in amorphous Si-C-N hard films".Surface & Coatings Technology 258(2014):353-358. |
入库方式： OAI收割
来源：金属研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。