Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension
文献类型：期刊论文
| 作者 | Yang LS ; Liu L ; Wang GY ; Xu ZZ(徐至展) |
| 刊名 | opt. eng.
 |
| 出版日期 | 2001 |
| 卷号 | 40期号:6页码:909 |
| 关键词 | PZT actuator inverse piezoelectric extension measurement differential confocal microscopy |
| ISSN号 | 0091-3286 |
| 中文摘要 | a noncontacting and noninterferometric depth discrimination technique, which is based on differential confocal microscopy, was used to measure the inverse piezoelectric extension of a piezoelectric ceramic lead zirconate titanate actuator. the response characteristics of the actuator with respect to the applied voltage, including displacement, linearity, and hysteresis, were obtained with nanometer measurement accuracy. errors of the measurement have been analyzed. (c) 2001 society of photo-optical instrumentation engineers. |
| 语种 | 英语 |
| WOS记录号 | WOS:000169701600005 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/132]  |
| 专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Yang LS,Liu L,Wang GY,et al. Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension[J]. opt. eng.,2001,40(6):909, 913. |
| APA | Yang LS,Liu L,Wang GY,&徐至展.(2001).Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension.opt. eng.,40(6),909. |
| MLA | Yang LS,et al."Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension".opt. eng. 40.6(2001):909. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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