Faithful replication of grating patterns in polymer through electrohydrodynamic instabilities
文献类型：期刊论文
| 作者 | Zhang H.; Zhang H. |
| 刊名 | Journal of Micromechanics and Microengineering
 |
| 出版日期 | 2014 |
| 卷号 | 24期号:7页码:9 |
| ISSN号 | ISBN/0960-1317 |
| 英文摘要 | Electrohydrodynamic instability patterning (EHDIP) as an alternative patterning method has attracted a great deal of attention over the past decade. This article demonstrates the faithful transfer of patterns with a high aspect ratio onto a polymer film via electrohydrodynamic instabilities for a given patterned grating mask. We perform a simple mathematical analysis to determine the influence of process parameters on the pressure difference Delta P. Through numerical simulation, it is demonstrated that thick films subject to large electric fields are essential to realize this faithful replication. In particular, the influence of the material properties of the polymer on pattern replication is discussed in detail. It is found that, to achieve the smaller periodic patterns with a higher resolution, film with a larger value of the dielectric constant and smaller value of the surface tension should be chosen. In addition, an ideal replication of the mask pattern with a short evolution time is possible by reducing the viscosity of the polymer liquid. Finally, the experiments of the pattern replication with and without defects are demonstrated to compare with the numerical simulation results. It is found that experiments are in good agreement with the simulation results and prove that the numerical simulation method provides an effective way to predict faithful replication. |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/43991]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Zhang H.,Zhang H.. Faithful replication of grating patterns in polymer through electrohydrodynamic instabilities[J]. Journal of Micromechanics and Microengineering,2014,24(7):9. |
| APA | Zhang H.,&Zhang H..(2014).Faithful replication of grating patterns in polymer through electrohydrodynamic instabilities.Journal of Micromechanics and Microengineering,24(7),9. |
| MLA | Zhang H.,et al."Faithful replication of grating patterns in polymer through electrohydrodynamic instabilities".Journal of Micromechanics and Microengineering 24.7(2014):9. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。