Pupil non-balance calibration for lithographic lens
文献类型：期刊论文
| 作者 | Zhang W.; Zhang W. |
| 刊名 | Zhongguo Jiguang/中文 Journal of Lasers
 |
| 出版日期 | 2014 |
| 卷号 | 41期号:9 |
| ISSN号 | ISBN/02587025 |
| 英文摘要 | As one of the critical target of lithographic lens, pupil non-balance is modulated by many factors. It is necessary to distinguish the respective contribution of those factors. In this paper, a method is introduced to calibrate pupil balance by removing telecentriciy, and a comparison is made with another approach based on finding centroid. A user defined program, which is written in Matlab with the function of manipulating Code V and LightTools data, is consequently made up to implement the above technique and calculate the real position of pupil intensity in angular plane without telecentircity. Beside, a series of simulation on an optimally designed lithographic lens under off-axis illumination is given to show the verification. It is revealed that this method is functional in calibrating pupil non-balance with a high level of implement efficiency. |
| 收录类别 | EI |
| 语种 | 中文 |
| 公开日期 | 2015-05-27 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/44297]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Zhang W.,Zhang W.. Pupil non-balance calibration for lithographic lens[J]. Zhongguo Jiguang/中文 Journal of Lasers,2014,41(9). |
| APA | Zhang W.,&Zhang W..(2014).Pupil non-balance calibration for lithographic lens.Zhongguo Jiguang/中文 Journal of Lasers,41(9). |
| MLA | Zhang W.,et al."Pupil non-balance calibration for lithographic lens".Zhongguo Jiguang/中文 Journal of Lasers 41.9(2014). |
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