Transmission-Type Plano-Concave Lens Using in the Range of Extreme Ultraviolet Wavelength
文献类型：期刊论文
| 作者 | Li, Yan1 ; Xu, Xiangyan2; Li, Xiao-Li1
|
| 刊名 | ieee photonics technology letters
 |
| 出版日期 | 2014-06-15 |
| 卷号 | 26期号:12页码:1239-1242 |
| 关键词 | Extreme ultraviolet band Fibonacci multi-layer films photonic crystal lens negative refractive index |
| ISSN号 | 1041-1135 |
| 产权排序 | 2 |
| 合作状况 | 国内 |
| 英文摘要 | a one-dimensional photonic crystal consisting of the fourth-order fibonacci multilayer films has been studied by the finite-difference time-domain method and transfer matrix method. the refractive indices for two layers of the fibonacci multilayer films are similar with that of manganese and silicon in the extreme ultraviolet (euv) band. the simulation result shows that there is an isotropic negative refractive index for the one-dimensional photonic crystal. based on the character above, a kind of transmission-type plano-concave lens, which can be used in the euv band (or soft x-ray), is designed. the distributions of the electromagnetic field for the lens and transimissivity of the fibonacci multilayers films have also been calculated. the result demonstrates that the lens can focus the incoming euv radiation, and its transmissivity is bigger than 5%-9% compared with that of the fibonacci multilayers films, having the same structure with the lens. this letter has potential applications in the tansmission-type lens for euv lithography. |
| WOS标题词 | science & technology ; technology ; physical sciences |
| 类目[WOS] | engineering, electrical & electronic ; optics ; physics, applied |
| 研究领域[WOS] | engineering ; optics ; physics |
| 关键词[WOS] | photonic crystals |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000337149300005 |
| 公开日期 | 2015-03-26 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/22475]  |
| 专题 | 条纹相机工程中心 |
| 作者单位 | 1.Xian Shiyou Univ, Sch Sci, Xian 710065, Peoples R China 2.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, Yan,Xu, Xiangyan,Li, Xiao-Li. Transmission-Type Plano-Concave Lens Using in the Range of Extreme Ultraviolet Wavelength[J]. ieee photonics technology letters,2014,26(12):1239-1242. |
| APA | Li, Yan,Xu, Xiangyan,&Li, Xiao-Li.(2014).Transmission-Type Plano-Concave Lens Using in the Range of Extreme Ultraviolet Wavelength.ieee photonics technology letters,26(12),1239-1242. |
| MLA | Li, Yan,et al."Transmission-Type Plano-Concave Lens Using in the Range of Extreme Ultraviolet Wavelength".ieee photonics technology letters 26.12(2014):1239-1242. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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