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  2. 上海光学精密机械研究所
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  4. 强场激光物理国家重点实验室
Fabrication of microelectrodes deeply embedded in LiNbO3 using a femtosecond laser

文献类型：期刊论文

作者Liao Yang ; Xu Jian ; Sun Haiyi ; Song Juan ; Wang Xinshun ; Cheng Ya
刊名appl. surf. sci.
出版日期2008
卷号254期号:21页码:7018
关键词selective electroless plating femtosecond pulsed laser microelectrode lithium niobate
ISSN号0169-4332
中文摘要we present a novel technique to fabricate deeply embedded microelectrodes in linbo3 using femtosecond pulsed laser ablation and selective electroless plating. the fabrication process mainly consists of four steps, which are (1) micromachining of microgrooves on the surface of linbo3 by femtosecond laser ablation; (2) formation of agno3 films on substrates; (3) scanning the femtosecond laser beam in the fabricated microgrooves for modi. cation of the inner surfaces; and (4) electroless copper plating. the void-free electroless copper plating is obtained with appropriate cross section of microgrooves and uniform initiation of the autocatalytic deposition on the inner surface of grooves. the dimension and shape of the microelectrodes could be accurately controlled by changing the conditions of femtosecond laser ablation, which in turn can control the distribution of electric field inside linbo3 crystal for various applications, opening up a new approach to fabricate three-dimensional integrated electro-optic devices. (c) 2008 elsevier b. v. all rights reserved.
学科主题激光技术;激光物理与基本理论
收录类别EI
资助信息national basic research program of china [2006cb806000]; chinese academy of sciences
语种英语
公开日期2009-09-18 ; 2010-10-12
源URL[http://ir.siom.ac.cn/handle/181231/514]  
专题上海光学精密机械研究所_强场激光物理国家重点实验室
推荐引用方式
GB/T 7714		 Liao Yang,Xu Jian,Sun Haiyi,et al. Fabrication of microelectrodes deeply embedded in LiNbO3 using a femtosecond laser[J]. appl. surf. sci.,2008,254(21):7018, 7021.
APA Liao Yang,Xu Jian,Sun Haiyi,Song Juan,Wang Xinshun,&Cheng Ya.(2008).Fabrication of microelectrodes deeply embedded in LiNbO3 using a femtosecond laser.appl. surf. sci.,254(21),7018.
MLA Liao Yang,et al."Fabrication of microelectrodes deeply embedded in LiNbO3 using a femtosecond laser".appl. surf. sci. 254.21(2008):7018.

入库方式： OAI收割

来源：上海光学精密机械研究所

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