Microstructure and chemical bond evolution of diamond-like carbon films machined by femtosecond laser
文献类型：期刊论文
| 作者 | Wang, Jing1; Wang, Chunhui1; Liu, Yongsheng1; Cheng, Laifei1; Li, Weinan2 ; Zhang, Qing1; Yang, Xiaojun2
|
| 刊名 | applied surface science
 |
| 出版日期 | 2015-06-15 |
| 卷号 | 340页码:49-55 |
| 关键词 | Diamond-like carbon films Femtosecond laser Machining technique Laser power Microstructure and chemical bond |
| 英文摘要 | femtosecond laser is of great interest for machining high melting point and hardness materials such as diamond like carbon, sic ceramic, et al. in present work, the microstructural and chemical bond evolution of diamond-like carbon films were investigated using electron microscopy and spectroscopy techniques after machined by diverse femtosecond laser power in air. the results showed the machining depth was essentially proportional to the laser power. the well patterned microgrooves and ripple structures with nanoparticles were formed distinctly in the channels. considering the d and g raman band parameters on the laser irradiation, it revealed a conversion from amorphous carbon to nanocrystalline graphite after laser treated with increasing laser power. x-ray photoelectron spectroscopy analysis showed a great decrease of sp(3)/sp(2) after laser treatment. (c) 2015 elsevier b.v. all rights reserved. |
| WOS标题词 | science & technology ; physical sciences ; technology |
| 类目[WOS] | chemistry, physical ; materials science, coatings & films ; physics, applied ; physics, condensed matter |
| 研究领域[WOS] | chemistry ; materials science ; physics |
| 关键词[WOS] | surface-wave plasma ; hydrogenated amorphous-carbon ; resonant raman-scattering ; thin-films ; dlc films ; graphite ; ablation ; spectroscopy ; deposition ; spectra |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000352213300007 |
| 公开日期 | 2015-07-28 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/24133]  |
| 专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
| 作者单位 | 1.Northwestern Polytech Univ, Sci & Technol Thermostruct Composite Mat Lab, Xian 710072, Peoples R China 2.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 10068, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Jing,Wang, Chunhui,Liu, Yongsheng,et al. Microstructure and chemical bond evolution of diamond-like carbon films machined by femtosecond laser[J]. applied surface science,2015,340:49-55. |
| APA | Wang, Jing.,Wang, Chunhui.,Liu, Yongsheng.,Cheng, Laifei.,Li, Weinan.,...&Yang, Xiaojun.(2015).Microstructure and chemical bond evolution of diamond-like carbon films machined by femtosecond laser.applied surface science,340,49-55. |
| MLA | Wang, Jing,et al."Microstructure and chemical bond evolution of diamond-like carbon films machined by femtosecond laser".applied surface science 340(2015):49-55. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。