Micromachining features of TiC ceramic by femtosecond pulsed laser
文献类型:期刊论文
作者 | Zhang, Ying1; Wang, Yuqian1; Zhang, Junzhan1; Liu, Yongsheng2; Yang, Xiaojun3![]() |
刊名 | ceramics international
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出版日期 | 2015-06-01 |
卷号 | 41期号:5页码:6525-6533 |
关键词 | Titanium carbide ceramic Morphology Micromachining |
英文摘要 | femtosecond pulsed laser was employed to drill blind holes (or circle surfaces) and through holes in titanium carbide (tic) ceramic by the helical drilling technique. the effects of spiral number, processing time, laser fluence and repetition rate on the qualities of holes (or circle surfaces) were investigated. morphology of holes (or circle surfaces) and composition of irradiated areas were analyzed by a scanning electron microscope (sem), a three-dimensional super depth digital microscope and energy dispersive spectroscopy (eds), etc. the results indicated that laser fluence and repetition rate had major effects on ablation efficiency and quality. blind holes with taper bottom were observed when the laser fluence was above 6.37 x 10(-1) j/mm(2). with the increase of laser fluence, hole depth increased firstly and then decreased. the change in hole diameter decreased when the laser fluence was above 0.51 j/mm(2). the effects of repetition rate on hole depth were similar to that of laser fluence, while it showed a faint change in hole diameter at laser fluence of 1.02 j/mm(2) and laser repetition rate ranging from 2 to 140 khz. furthermore, through holes were attained at narrowed laser fluence ranging from 0.51 to 1.53 j/mm(2). the drilled holes had good circular geometry for entrance and exit. (c) 2015 elsevier ltd and techna group s.r.l. all rights reserved. |
WOS标题词 | science & technology ; technology |
类目[WOS] | materials science, ceramics |
研究领域[WOS] | materials science |
关键词[WOS] | surface integrity ; composites ; substrate ; carbide |
收录类别 | SCI ; EI |
语种 | 英语 |
WOS记录号 | WOS:000353176300052 |
公开日期 | 2015-07-28 |
源URL | [http://ir.opt.ac.cn/handle/181661/25048] ![]() |
专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
作者单位 | 1.Xian Univ Architecture & Technol, Coll Mat & Mineral Resources, Xian 710055, Shaanxi Provinc, Peoples R China 2.Northwestern Polytech Univ, Sci & Technol Thermostruct Composite Mat Lab, Xian 710072, Shaanxi Provinc, Peoples R China 3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China |
推荐引用方式 GB/T 7714 | Zhang, Ying,Wang, Yuqian,Zhang, Junzhan,et al. Micromachining features of TiC ceramic by femtosecond pulsed laser[J]. ceramics international,2015,41(5):6525-6533. |
APA | Zhang, Ying,Wang, Yuqian,Zhang, Junzhan,Liu, Yongsheng,Yang, Xiaojun,&Zhang, Qing.(2015).Micromachining features of TiC ceramic by femtosecond pulsed laser.ceramics international,41(5),6525-6533. |
MLA | Zhang, Ying,et al."Micromachining features of TiC ceramic by femtosecond pulsed laser".ceramics international 41.5(2015):6525-6533. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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