Determination of Young's modulus of micromechanical silicon films using an acoustic excitation and optical detection resonance method
文献类型：期刊论文
| 作者 | Liu, YM; Tian, WJ; Zhang, SJ |
| 刊名 | measurement technology and intelligent instruments vi
 |
| 出版日期 | 2005 |
| 卷号 | 295-296页码:57-62 |
| 关键词 | micromechanical silicon film Young's modulus acoustic excitation optical detection |
| 英文摘要 | the young's modulus of micromechanical silicon films is very different from bulk silicon structures. it is very meaningful to test young's modulus of micromechanical silicon films in related studies. owing to its small and fragile characterstics, a suitable non-contact and nondestructive method is needed to test the young's modulus of micromechanical silicon films with plate-like and beamlike structures. utilizing acoustic excitation and optical detection method based on theoretical analysis, a new resonant method is presented to determinate young's modulus of rnicromachined silicon films. by using this novel method, more accurate results have been achieved and the measuring error is 11%, better than the reported 14%. |
| WOS标题词 | science & technology ; technology |
| 类目[WOS] | materials science, ceramics ; materials science, composites |
| 研究领域[WOS] | materials science |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000231595000010 |
| 公开日期 | 2015-08-18 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/25124]  |
| 专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
| 作者单位 | 1.Xian Univ Technol, Xian, Peoples R China 2.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Xian 710068, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liu, YM,Tian, WJ,Zhang, SJ. Determination of Young's modulus of micromechanical silicon films using an acoustic excitation and optical detection resonance method[J]. measurement technology and intelligent instruments vi,2005,295-296:57-62. |
| APA | Liu, YM,Tian, WJ,&Zhang, SJ.(2005).Determination of Young's modulus of micromechanical silicon films using an acoustic excitation and optical detection resonance method.measurement technology and intelligent instruments vi,295-296,57-62. |
| MLA | Liu, YM,et al."Determination of Young's modulus of micromechanical silicon films using an acoustic excitation and optical detection resonance method".measurement technology and intelligent instruments vi 295-296(2005):57-62. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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