Rapid fabrication of microfluidic chips based on the simplest LED lithography
文献类型：期刊论文
| 作者 | Li, Y; Wu, P; Luo, ZF; Ren, YX; Liao, MX; Feng, LL; Li, YT; He, LQ |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2015 |
| 卷号 | 25期号:5页码:55020-55020 |
| 关键词 | microfluidic chips ultraviolet LED photolithography |
| 通讯作者 | Li, Y (reprint author), Univ Sci & Technol China, Dept Thermal Sci & Energy Engn, 96 Jinzhai Rd, Hefei 230027, Anhui, Peoples R China.,heliqun@ustc.edu.cn |
| 英文摘要 | Microfluidic chips are generally fabricated by a soft lithography method employing commercial lithography equipment. These heavy machines require a critical room environment and high lamp power, and the cost remains too high for most normal laboratories. Here we present a novel microfluidics fabrication method utilizing a portable ultraviolet (UV) LED as an alternative UV source for photolithography. With this approach, we can repeat several common microchannels as do these conventional commercial exposure machines, and both the verticality of the channel sidewall and lithography resolution are proved to be acceptable. Further microfluidics applications such as mixing, blood typing and microdroplet generation are implemented to validate the practicability of the chips. This simple but innovative method decreases the cost and requirement of chip fabrication dramatically and may be more popular with ordinary laboratories. |
| 学科主题 | Engineering; Science & Technology - Other Topics; Instruments & Instrumentation; Materials Science; Mechanics |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics |
| 关键词[WOS] | PAPER-BASED MICROFLUIDICS ; LOW-COST ; BLOOD ; DEVICES ; POLY(DIMETHYLSILOXANE) ; DROPLETS ; FLOWS ; CELLS ; WAX |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000354802200021 |
| 版本 | 出版稿 |
| 源URL | [http://202.127.25.143/handle/331003/58]  |
| 专题 | 上海生化细胞研究所_上海生科院生化细胞研究所 |
| 推荐引用方式 GB/T 7714 | Li, Y,Wu, P,Luo, ZF,et al. Rapid fabrication of microfluidic chips based on the simplest LED lithography[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2015,25(5):55020-55020. |
| APA | Li, Y.,Wu, P.,Luo, ZF.,Ren, YX.,Liao, MX.,...&He, LQ.(2015).Rapid fabrication of microfluidic chips based on the simplest LED lithography.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,25(5),55020-55020. |
| MLA | Li, Y,et al."Rapid fabrication of microfluidic chips based on the simplest LED lithography".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 25.5(2015):55020-55020. |
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