Optical breakdown of 6H SiC induced by wavelength-tunable femtosecond laser pulses
文献类型：期刊论文
| 作者 | Chen HX ; Jia TQ(贾天卿) ; Huang M ; Zhao FL ; Kuroda H ; Xu ZZ(徐至展) |
| 刊名 | jpn. j. appl. phys. part 1
 |
| 出版日期 | 2006 |
| 卷号 | 45期号:1a页码:28 |
| 关键词 | femtosecond laser SiC crystal damage mechanisms NIR-NUV wavelength |
| ISSN号 | 0021-4922 |
| 中文摘要 | the damage mechanisms and micromachining of 6h sic are studied by using femtosecond laser pulses at wavelengths between near infrared (nir) and near ultraviolet (nuv) delivered from an optical parametric amplifier (opa). our experimental results indicate that high quality microstructures can be fabricated in sic crystals. on the basis of the dependence of the ablated area and the laser pulse energy, the threshold fluence of sic is found to increase with the incident laser wavelength in the visible region, while it remains almost constant for the nir laser. for the nir laser pulses, both photoionization and impact ionization play important roles in electronic excitation, while for visible lasers, photoionization plays a more important role. |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000235150700006 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/684]  |
| 专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Chen HX,Jia TQ,Huang M,et al. Optical breakdown of 6H SiC induced by wavelength-tunable femtosecond laser pulses[J]. jpn. j. appl. phys. part 1,2006,45(1a):28, 31. |
| APA | Chen HX,贾天卿,Huang M,Zhao FL,Kuroda H,&徐至展.(2006).Optical breakdown of 6H SiC induced by wavelength-tunable femtosecond laser pulses.jpn. j. appl. phys. part 1,45(1a),28. |
| MLA | Chen HX,et al."Optical breakdown of 6H SiC induced by wavelength-tunable femtosecond laser pulses".jpn. j. appl. phys. part 1 45.1a(2006):28. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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