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Control Strategy for a Low Cost Manipulator to Transport and Align IC Mask-Plates

文献类型：期刊论文

作者Xu, De; Tan, Min; Liu, Yun; Wang, Jianhua
刊名IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY
出版日期2009-09-01
卷号17期号:5页码:1018-1027
关键词Alignment control system four-quadrant photodetector (FQPD) hybrid control integrated-circuit (IC) optical lithography manipulator
英文摘要A 4-DOF manipulator is developed to carry mask-plates of integrated-circuit lithography. Its three translation axes are driven with servo motors, and its rotation axis is driven with a step motor. The manipulator is controlled with a programmable controller to execute two movement categories. One is the transport in large range, which is a feedback system with two loops such as position loop and velocity loop. Another is the alignment in small range, which is a feedback system with three loops including aligning loop, position loop, and velocity loop. The aligning errors are measured with two four-quadrant photodetectors. The property of the detectors is investigated, and a novel control strategy for alignment is proposed. Experiments were well conducted to verify the effectiveness of the proposed control system and algorithms.
WOS标题词Science & Technology ; Technology
类目[WOS]Automation & Control Systems ; Engineering, Electrical & Electronic
研究领域[WOS]Automation & Control Systems ; Engineering
关键词[WOS]FABRICATION ; SYSTEM ; MECHANISM ; DESIGN
收录类别SCI
语种英语
WOS记录号WOS:000269443200003
源URL[http://ir.ia.ac.cn/handle/173211/3432]  
专题自动化研究所_复杂系统管理与控制国家重点实验室_先进机器人控制团队
作者单位Chinese Acad Sci, Lab Complex Syst & Intelligence Sci, Inst Automat, Beijing 100190, Peoples R China
推荐引用方式
GB/T 7714		 Xu, De,Tan, Min,Liu, Yun,et al. Control Strategy for a Low Cost Manipulator to Transport and Align IC Mask-Plates[J]. IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY,2009,17(5):1018-1027.
APA Xu, De,Tan, Min,Liu, Yun,&Wang, Jianhua.(2009).Control Strategy for a Low Cost Manipulator to Transport and Align IC Mask-Plates.IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY,17(5),1018-1027.
MLA Xu, De,et al."Control Strategy for a Low Cost Manipulator to Transport and Align IC Mask-Plates".IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY 17.5(2009):1018-1027.

入库方式： OAI收割

来源：自动化研究所

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