DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS
文献类型：期刊论文
| 作者 | Wang XB(王小保); Qian J(钱劲) ; Zhang DC(张大成)
|
| 刊名 | Acta Mechanica Sinica
 |
| 出版日期 | 2004 |
| 期号 | 2页码:152-158 |
| 通讯作者邮箱 | dchzhang@ime.pku.edu.cn |
| 关键词 | micromachined flowmeters bulk-micromachining piezoresistivity Wheatstone bridge |
| ISSN号 | 0567-7749 |
| 中文摘要 | Micromachined piezoresistive flowmeters with four different types of sensing struc-tures have been designed,fabricated and tested.Piezoresistors were defined at the end of the sensorsthrough p-diffusion,and their values were about 3.5kΩ.Wheatstone bridge was configured with thepiezoresistors in ... |
| 类目[WOS] | Engineering, Mechanical ; Mechanics |
| 研究领域[WOS] | Engineering ; Mechanics |
| 收录类别 | SCI ; EI ; CSCD |
| 语种 | 英语 |
| WOS记录号 | WOS:000221518600007 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/55154]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Wang XB,Qian J,Zhang DC. DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS[J]. Acta Mechanica Sinica,2004(2):152-158. |
| APA | 王小保,钱劲,&张大成.(2004).DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS.Acta Mechanica Sinica(2),152-158. |
| MLA | 王小保,et al."DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS".Acta Mechanica Sinica .2(2004):152-158. |
入库方式： OAI收割
来源：力学研究所
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