Quantitative analysis of oxygen content in copper oxide films using ultra microbalance
文献类型:会议论文
作者 | Shu YH(舒勇华)![]() ![]() ![]() ![]() |
出版日期 | 2014 |
会议名称 | The 29th International Symposium on Rarefied Gas Dynamics |
会议日期 | 2014-07-13 |
会议地点 | 中国陕西西安 |
关键词 | quartz chamber minutes heated vacuum |
中文摘要 | The oxygen content is one of the key factors that determine the property of the functional oxide films,and it is important to detect the oxygen content accurately.In this article,we try to analyze the oxygen content in copper oxide films using ultra microbalance.The Copper oxide films were prepar... |
会议网址 | http://dx.doi.org/10.1063/1.4902628 |
会议录 | Proceedings of 29th International Symposium on Rarefied Gas Dynamics
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语种 | 英语 |
源URL | [http://dspace.imech.ac.cn/handle/311007/55208] ![]() |
专题 | 力学研究所_高温气体动力学国家重点实验室 |
推荐引用方式 GB/T 7714 | Shu YH,Liu C,Wang LH,et al. Quantitative analysis of oxygen content in copper oxide films using ultra microbalance[C]. 见:The 29th International Symposium on Rarefied Gas Dynamics. 中国陕西西安. 2014-07-13.http://dx.doi.org/10.1063/1.4902628. |
入库方式: OAI收割
来源:力学研究所
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