Thickness dependence of properties and structure of ultrathin tetrahedral amorphous carbon films: A molecular dynamics simulation
文献类型：期刊论文
| 作者 | Li, Xiaowei ; Xu, Shipeng ; Ke, Peiling ; Wang, Aiying |
| 刊名 | SURFACE & COATINGS TECHNOLOGY
 |
| 出版日期 | 2014 |
| 卷号 | 258页码:938 |
| 中文摘要 | Molecular dynamics simulation was performed to investigate the effect of thickness on the properties and structure of ultrathin tetrahedral amorphous carbon films (ta-C). The present simulation showed that both the density and residual compressive stress decreased with increasing the thickness of ultrathin ta-C films, which was in agreement with the experimental results. The gradient of properties with the thickness was dependent on the incident kinetic energy of deposited atoms; when the incident kinetic energy was 10 eV/atom, the slower gradient was observed. Further structural analysis indicated that the critical relaxation of highly distorted bond angles was responsible for the reduction of residual compressive stress in the films deposited at 10 eV/atom, while the joint relaxation of both the distorted bond angles and C-C bond length led to the fast release of residual compressive stress in the films deposited at 70 eV/atom. (C) 2014 Elsevier B.V. All rights reserved. |
| 公开日期 | 2015-09-20 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/11680]  |
| 专题 | 宁波材料技术与工程研究所_2014专题 |
| 推荐引用方式 GB/T 7714 | Li, Xiaowei,Xu, Shipeng,Ke, Peiling,et al. Thickness dependence of properties and structure of ultrathin tetrahedral amorphous carbon films: A molecular dynamics simulation[J]. SURFACE & COATINGS TECHNOLOGY,2014,258:938. |
| APA | Li, Xiaowei,Xu, Shipeng,Ke, Peiling,&Wang, Aiying.(2014).Thickness dependence of properties and structure of ultrathin tetrahedral amorphous carbon films: A molecular dynamics simulation.SURFACE & COATINGS TECHNOLOGY,258,938. |
| MLA | Li, Xiaowei,et al."Thickness dependence of properties and structure of ultrathin tetrahedral amorphous carbon films: A molecular dynamics simulation".SURFACE & COATINGS TECHNOLOGY 258(2014):938. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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