Silicon-hydrogen bond effects on aluminum-induced crystallization of hydrogenated amorphous silicon films
文献类型：期刊论文
| 作者 | Zhai, Xiaoli ; Tan, Ruiqin ; Wang, Weiyan ; Huang, Jinhua ; Zhuang, Fuqiang ; Dai, Shixun ; Song, Weijie |
| 刊名 | JOURNAL OF CRYSTAL GROWTH
 |
| 出版日期 | 2014 |
| 卷号 | 402页码:99 |
| 中文摘要 | The effects of hydrogen dilution on aluminum-induced crystallization (ALE) of hydrogenated amorphous silicon (a-Si H) films have been studied. The Raman spectra showed that the short-range order (SRO) and the intermedium-range order (IRO) of the as-deposited a-Si films increased with the increase of the H2 dilution from 0% to 20%. The optical microscope (OM) and X-ray diffraction (XRD) observation revealed that, compared to the a-Si:H film deposited in pure Ar, the a-Si:H films deposited with H2 dilution in the range of 3-8% possessed a lower crystallization rate while the a-Si:H films deposited with high H2 dilution in the range of 15-20% possessed a faster crystallization rate. It was found that majority of the hydrogen existed in the form of monohydride (SiH) bond in the a-Si:H films with H2 dilution ratio of 3-8%, the bonding energy of which was higher than that of Si-Si bond, leading to a lower crystallization rate of a-Si:H films. While the dihydride (SiH2) bond became dominant in the a-Si:H films with high H-2 dilution of 15-20%, the bonding energy of which was lower than that of Si-Si bond, thus accelerating the crystallization rate. Therefore, it was illustrated that not the hydrogen concentration but the form of silicon-hydrogen bond determined the AlC process of a-Si:H films. (C) 2014 Elsevier B.V. All rights reserved. |
| 公开日期 | 2015-09-20 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/11755]  |
| 专题 | 宁波材料技术与工程研究所_2014专题 |
| 推荐引用方式 GB/T 7714 | Zhai, Xiaoli,Tan, Ruiqin,Wang, Weiyan,et al. Silicon-hydrogen bond effects on aluminum-induced crystallization of hydrogenated amorphous silicon films[J]. JOURNAL OF CRYSTAL GROWTH,2014,402:99. |
| APA | Zhai, Xiaoli.,Tan, Ruiqin.,Wang, Weiyan.,Huang, Jinhua.,Zhuang, Fuqiang.,...&Song, Weijie.(2014).Silicon-hydrogen bond effects on aluminum-induced crystallization of hydrogenated amorphous silicon films.JOURNAL OF CRYSTAL GROWTH,402,99. |
| MLA | Zhai, Xiaoli,et al."Silicon-hydrogen bond effects on aluminum-induced crystallization of hydrogenated amorphous silicon films".JOURNAL OF CRYSTAL GROWTH 402(2014):99. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。